DescriptionAOI for IC Substrates and ultra fine line HDI with minimum line/space support down to 10 µm. Galaxy 10Cχ, CIMS latest generation AOI system equipped with a color camera, is designed to support high-volume manufacturing of advanced IC substrates and ultra fine-line HDI. It scans down to 10 µm line/space width technology and combines high-resolution image acquisition with customizable detection algorithms. The system optical technology Prisma™ Gen II delivers flexible illumination coverage and maximum contrast to enable high-resolution imaging at high scan speeds. Paired with advanced image acquisition and software capabilities, the Galaxy family provides accurate detection with a low false-call rate. Galaxy 10Cχ is powered by Spark™ 3.0, CIMS' latest generation cross-platform detection engine.
Highlights- Linear motors for smooth & silent motion
- Compact mechanical platform
- 6th generation hardware
- Enhanced illumination block
- Fast and intuitive setup for new jobs
- Compatible with front AMHS automation or robot
Options- Fi™ – final inspection option for finished boards
- +2DM™ metrology – panel dimensions measurement
- +2CD™ metrology – 2D measurement of circuit elements
- +3DH™ metrology – 3D measurements of circuit element height
- +3DP™ metrology – 3D profiling of circuit elements
- LDI™ – laser drill inspection option
- CDB™/CDBIC™ – defects classification and virtual defects mapping
- VVS™ – virtual verification system
- X-WAVE™ – multi-wave illumination
Specifications- Application: AOI for IC Substrates and ultra fine line HDI
- Minimum line/space supported: down to 10 µm
- Camera: color camera for high-resolution acquisition
- Optical technology: Prisma™ Gen II for flexible light coverage and maximum contrast
- Detection engine: Spark™ 3.0 cross-platform detection engine
- Performance: high-resolution imaging at high scanning speed with customizable detection algorithms
- Platform: compact mechanical platform with linear motors for smooth and silent motion
- Hardware generation: 6th generation hardware
- Illumination: enhanced illumination block, X-WAVE™ multi-wave option available
- Automation: compatible with front AMHS automation or robot
- Metrology options: +2DM™, +2CD™, +3DH™, +3DP™
- Inspection additions: Fi™ final inspection, LDI™ laser drill inspection
- Software options: CDB™/CDBIC™ defects classification and virtual mapping; VVS™ virtual verification system
- Designed for: high-volume manufacturing with low false-call rate