Optical inspection system Galaxy Fi 15Cμ

camerameasurementfor defect detection

Description
Galaxy Fi 15Cμ is a panel-based final inspection system designed for final inspection of standard IC substrates, HDI and MLB PCBs. It features a high-resolution color camera and optical technology optimized to resolve down to 15 µm line/space, ensuring high contrast on solder mask, plated copper, gold plated/OTC and bare laminate.

Highlights

• Linear motors for smooth and silent motion
• Robust mechanical structure with automated vacuum table
• High-performance image acquisition and processing firmware
• Next-generation computer architecture to handle large data sets
• Fast, intuitive job setup to reduce changeover time
• Compatible with front/back AMHS automation or robot integration

Options

• +2DM™ metrology – panel dimensions measurement
• +2CD™ metrology – 2D measurement of circuit elements
• +3DH™ metrology – 3D measurements of circuit element height
• +3DP™ metrology – 3D profiling of circuit element
• CDB™/CDBIC™ – defects classification and virtual defects mapping
• X-WAVE™ – multi-wave illumination

Technical specifications

• Application: Panel final inspection for standard IC substrates, HDI and MLB PCB
• Minimum resolvable line/space: 15 µm
• Imaging: Color camera with high-resolution image acquisition
• Optical performance: Optimized for maximum contrast on solder mask, plated copper, gold plated/OTC and bare laminate
• Detection engine: Spark™ 3.0 cross-platform detection engine
• Motion system: Linear motors for smooth and silent motion
• Mechanical: Robust mechanical structure with automated vacuum table
• Processing: High-performance image processing firmware and next-generation computer for large data
• Usability: Fast and intuitive setup for new jobs
• Automation: Compatible with front/back AMHS automation or robot
• Optional metrology and inspection features: 2DM™, 2CD™, 3DH™, 3DP™, CDB™/CDBIC™, X-WAVE™