Description Capricorn 5Cχ is an AVI system for IC substrates with minimum line/space capability down to 5 µm. Equipped with a color camera and a 1.6 µm optical pixel size, it is designed for final inspection of advanced IC substrates. The system's dual-stage and dual-camera architecture enables high-capacity inspection and improved detection on both metal and solder mask surfaces. Capricorn 5Cχ is fully compatible with Industry 4.0 requirements and integrates with database systems and virtual verification workflows.
Highlights - Superior detection on both metal and solder mask
- Detection of defects under solder mask
- Inspection with multiple resolutions
- 4 fully automated magazines
- High-performance image processing firmware
- Powerful processors to handle large data
- Easy and intuitive setup
Options - Integrated automated strip cleaner
- Barcode reading capability
- Anti-static ionizer device
- CDB™/CDBIC™ – defects classification and virtual defects mapping
- X-WAVE™ ‒ multi-wave illumination
- VVS™ ‒ virtual verification system
- SECS/GEM™ connectivity
Technical specifications - Application: Automated Visual Inspection (AVI) for IC substrates
- Minimum detectable line/space: 5 µm
- Optical pixel size: 1.6 µm
- Camera: color camera
- Mechanical configuration: dual-stage and dual-camera
- Detection engine: Spark™ 3.0 (cross-platform)
- Compatibility: VVS™/AVI virtual verification system, SECS/GEM™ protocols
- Industry 4.0 features: barcode scanning/handling, internal/external database connectivity
- Magazines: 4 fully automated magazines
- Detection capability: enhanced detection on metal and solder mask, including defects under solder mask
- Performance: high-performance image processing firmware and powerful processors to handle large data