Optical inspection system Galaxy Fi 7Cχ

cameraautomatedrobotic

Description
Panel final inspection for advanced IC Substrates and ultra fine line HDI with minimum line/space capability down to 7 µm. Galaxy Fi 7Cχ, CIMS latest panel-based final inspection system, is designed to support final inspection of advanced IC substrates and ultra fine line HDI. It is equipped with a color camera and capable of scanning down to 7 µm line/space width technology. The system’s state-of-the-art optical technology for final inspection is designed to achieve maximum contrast on panels covered by solder mask resist and produced with various metal finishing processes. This technology supports high-resolution image acquisition and ensures reliable detection of defects on plated copper, gold plated or OTC, solder mask and bare laminate. Equipped with state-of-the-art image acquisition and advanced software capabilities, the Galaxy product family is renowned for exceptional detection with the lowest possible false-call rate. Galaxy Fi 7Cχ is powered by Spark™ 3.0 – an innovative cross-platform detection engine.

Highlights

• Linear motors for smooth & silent motion
• Robust mechanical structure
• Automated vacuum table
• High-performance image processing firmware
• Next-generation computer to process large data volumes
• Fast and intuitive setup for new jobs
• Compatible with front/back AMHS automation or robot

Options

• +2DM™ metrology – panel dimensions measurement
• +2CD™ metrology – 2D measurement of circuit elements
• +3DH™ metrology – 3D measurements of circuit element height
• +3DP™ metrology – 3D profiling of circuit elements
• CDB™/CDBIC™ – defects classification and virtual defects mapping
• X-WAVE™ – multi-wave illumination

Caractéristiques / spécifications techniques

• Application: Panel final inspection for advanced IC Substrates and ultra fine line HDI
• Minimum line/space capability: 7 µm
• Imaging: Color camera, high-resolution image acquisition
• Optical technology: Designed for maximum contrast on solder mask resist and various metal finishes
• Supported materials/finishes: Plated copper, gold plated (or OTC), solder mask, bare laminate
• Software/detection engine: Spark™ 3.0 cross-platform detection engine
• Motion: Linear motors for smooth and silent motion
• Mechanics: Robust mechanical structure; automated vacuum table
• Processing hardware: Next-generation computer to process large data volumes
• Automation: Compatible with front/back AMHS automation or robot
• Available metrology/options: 2DM™, 2CD™, 3DH™, 3DP™, CDB™/CDBIC™, X-WAVE™