DescriptionHybrid-mode AOI verification station for IC Substrates with minimum line/space support down to 4 µm. VVR combines virtual (post-processed AOI images) and live video verification within a single workstation to support high-volume manufacturing of IC substrates. Series include VVR 4μ, VVR 5μ, VVR 7μ, VVR 10μ and VVR 15μ.
Highlights- Integrated verification of AOI post-processed images and live video
- Up to 70% increase in verification efficiency versus traditional verification modes
- Display of post-processed color defect images directly from AOI
- Variable zoom and automated calibration for repeatable inspection
- Stationary vacuum table for secure substrate handling
- Ergonomic workstation design
- Clear defect imaging with adjustable video lighting
Options- Auto-marker for automated defect marking
- Barcode reader for traceability
- Adjustable monitor arm
- CDB™/CDBIC™ — defect classification and virtual defects mapping
- SharpLight™ — enhanced video image processing
- Optional touchscreen for operator classification and real-time QA feedback
Technical specifications- Product type: Hybrid-mode AOI verification station for IC Substrates
- Minimum line/space supported: down to 4 µm
- Series models: VVR 4μ, VVR 5μ, VVR 7μ, VVR 10μ, VVR 15μ
- Verification modes: virtual verification (post-processed AOI images) and live video mode
- Image processing: advanced image enhancement algorithms; post-processed color defect images from AOI
- Efficiency improvement: up to 70% vs. traditional verification mode
- Optics/features: variable zoom, automated calibration, adjustable video light, SharpLight™ option
- Mechanics: stationary vacuum table, ergonomic design, adjustable monitor arm (option)
- Traceability/marking: Auto-marker option, barcode reader option
- Software/options: CDB™/CDBIC™ for defect classification and virtual defects mapping
- Integration: compatible with all CIMS AOI systems