DescriptionAVI for IC substrates with minimum line/space down to 8 µm.
Capricorn 8Cχ, CIMS latest-generation AVI system equipped with a color camera, is designed for final inspection of advanced IC substrates. It can scan technologies with 8 µm line/space and uses a 2.2 μm optical pixel size.
Capricorn AVI systems feature dual-stage and dual-camera architecture and are powered by advanced hardware and software to deliver high-capacity inspection with enhanced detection capabilities on both metal and solder mask.
Capricorn AVI systems are fully compatible with Industry 4.0 requirements, including barcode scanning and handling, internal and external database connectivity, full compatibility with the CIMS virtual verification system for AVI inspection (VVS™/AVI), and support for external data protocols for smart factory integration.
Capricorn 8Cχ is powered by Spark™ 3.0 — an innovative cross-platform detection engine.
Highlights- Superior detection on both metal and solder mask
- Detection of defects under solder mask
- Inspection with multiple resolutions
- 4 fully automated magazines
- High-performance image processing firmware
- Powerful processors to handle large data
- Easy and intuitive setup
Options- Integrated automated strip cleaner
- Barcode reading capability
- Anti-static ionizer device
- CDB™/CDBIC™ – defects classification and virtual defects mapping
- X-WAVE™ ‒ multi-wave illumination
- VVS™ ‒ virtual verification system
- SECS/GEM™ connectivity
Technical specifications- Minimum line/space: 8 µm
- Optical pixel size: 2.2 μm
- Color camera
- Dual-stage and dual-camera architecture
- Powered by Spark™ 3.0 detection engine
- Superior detection on metal and solder mask; defect detection under solder mask
- Inspection with multiple resolutions
- 4 fully automated magazines
- High-performance image processing firmware and powerful processors
- Industry 4.0 compatibility: barcode handling, internal/external database connectivity
- Compatibility with VVS™/AVI virtual verification system
- Support for external factory data protocols including SECS/GEM™