OverviewGalaxy 7Cχ is an automated optical inspection (AOI) system for IC substrates, designed to support high-volume manufacturing with minimum detectable line/space down to 7 µm. The system uses a color camera and advanced optics to acquire high-resolution images at production scan speeds.
Highlights- Prisma™ Gen II optical technology for flexible illumination coverage and high contrast
- Spark™ 3.0 cross-platform detection engine for customizable defect detection
- Color image acquisition optimized for high-resolution capture at speed
- Linear motors ensuring smooth and quiet motion
- Compact mechanical platform suitable for factory integration
- 6th generation hardware with enhanced illumination block
- Fast, intuitive setup to reduce job changeover time
Options- Fi™ – final inspection option for finished boards
- +2DM™ metrology – panel dimensions measurement
- +2CD™ metrology – 2D measurement of circuit elements
- +3DH™ metrology – 3D measurement of circuit element height
- +3DP™ metrology – 3D profiling of circuit elements
- LDI™ – laser drill inspection option
- CDB™/CDBIC™ – defect classification and virtual defect mapping
- VVS™ – virtual verification system
- X-WAVE™ – multi-wave illumination
Technical specifications- Minimum detectable line/space: down to 7 µm
- Optical technology: Prisma™ Gen II for flexible illumination and maximum contrast
- Image acquisition: color camera with high-resolution capture at high scanning speed
- Detection engine: Spark™ 3.0 cross-platform detection engine
- Mechanical motion: linear motors for smooth and silent motion
- Platform: compact mechanical platform for factory integration
- Hardware generation: 6th generation hardware
- Illumination: enhanced illumination block (multi-wave option X-WAVE™ available)
- Software: customizable detection algorithms to optimize detection and minimize false calls
- Automation compatibility: compatible with front AMHS automation or robot
- Available metrology and inspection options: Fi™, +2DM™, +2CD™, +3DH™, +3DP™, LDI™, CDB™/CDBIC™, VVS™