Optical inspection system Phoenix PT/Micro

video visioncameraautomatic

Product Description
Phoenix PT/Micro, a CIMS AOI system, is designed to inspect ultra fine line photo-tools such as film artworks and glass masks. It supports detection down to 7 µm line/space width. Using transmissive illumination optimized for mask inspection, the system ensures reliable detection of defects that could be transferred to panels produced with defective masks. Performance is achieved by combining high-quality image acquisition with customizable detection algorithms and advanced processing firmware. Phoenix PT/Micro is powered by Spark™ — a cross-platform detection engine providing high detection rates with minimal false calls.

Highlights

• Clear or matte glass table
• Compatible with a wide range of frames
• Suitable for both glass masks and film artworks
• Robust mechanical structure
• Ergonomic design for operator handling
• High-performance image processing firmware
• Powerful processors to handle large data volumes
• Fast and intuitive setup for new jobs

Options

• Multiple glass mask frame sizes
• Universal frame adaptor
• Integrated height tracker
• +2CD™ metrology — 2D measurement of circuit elements
• CDB™/CDBIC™ — defect classification and virtual defect mapping

Technical specifications

• Model: Phoenix PT/Micro
• Application: AOI for ultra fine line photo-tools (film artworks and glass masks)
• Minimum detectable line/space: down to 7 µm
• Illumination: transmissive light path optimized for mask inspection
• Detection engine: Spark™ cross-platform detection engine
• Image acquisition: state-of-the-art high-quality image acquisition
• Software: customizable detection algorithms, advanced processing firmware
• Mechanical: robust structure, ergonomic design, compatible with multiple frame sizes
• Optional metrology and classification: +2CD™ metrology, CDB™/CDBIC™