DescriptionAutomated Optical Inspection (AOI) for IC substrates, the Galaxy 5Cχ supports minimum line/space technology down to 5 µm. Designed for high-volume manufacturing, it combines high-resolution color imaging with advanced optical and detection engines to identify process and assembly defects on advanced substrates.
Key capabilities- Inspection down to 5 µm line/space for advanced IC substrate technologies
- High-resolution color camera for enhanced feature recognition
- Prisma™ Gen II optical technology for flexible illumination and maximum contrast
- Spark™ 3.0 cross-platform detection engine with customizable algorithms
- Optimized balance of resolution and scanning speed for high throughput
Highlights- Linear motors for smooth, low-noise motion
- Compact mechanical platform for factory floor integration
- 6th generation hardware for improved processing and reliability
- Enhanced illumination block with optional X-WAVE™ multi-wave illumination
- Fast and intuitive job setup to reduce changeover time
- Compatible with front AMHS automation or robot handling
Options- Fi™ — final inspection option for finished boards
- +2DM™ metrology — panel dimensions measurement
- +2CD™ metrology — 2D measurement of circuit elements
- +3DH™ metrology — 3D height measurement of circuit elements
- +3DP™ metrology — 3D profiling of circuit elements
- LDI™ — laser drill inspection option
- CDB™ / CDBIC™ — defect classification and virtual defect mapping
- VVS™ — virtual verification system
- X-WAVE™ — multi-wave illumination option
Technical specifications- Application: Automated Optical Inspection (AOI) for IC substrates
- Minimum line/space capability: 5 µm
- Camera: high-resolution color camera
- Optical technology: Prisma™ Gen II (flexible illumination, high contrast)
- Detection engine: Spark™ 3.0 (cross-platform, customizable algorithms)
- Motion system: linear motors for smooth, silent motion
- Mechanical design: compact platform suitable for integration
- Hardware generation: 6th generation hardware
- Illumination: enhanced illumination block; X-WAVE™ optional
- Metrology options: +2DM™, +2CD™, +3DH™, +3DP™
- Additional options: Fi™, LDI™, CDB™/CDBIC™, VVS™
- Automation compatibility: compatible with front AMHS automation or robot handling