Optical inspection system Phoenix PT+

cameraautomatedglass surface

Description
Phoenix PT+, a CIMS AOI system, is designed to inspect high-resolution phototools such as film artworks and glass masks. It can scan down to 12.5 µm line/space width. Since masks are used with transmissive light, Phoenix PT+ implements the same illumination path for inspection to reliably detect defects that could be transferred to panels produced with defective masks. The system combines high image quality with customizable detection algorithms. Equipped with state-of-the-art image acquisition hardware and advanced software, the Phoenix family delivers high detection performance with a low false-call rate. Phoenix PT+ is powered by Spark™ — a cross-platform detection engine.

Highlights

• Clear or matte glass table
• Compatible with a wide range of frames
• Suitable for both glass masks and film artworks
• Robust mechanical structure
• Highly ergonomic design
• High-performance image processing firmware
• Powerful processors to handle large data volumes
• Fast and intuitive setup for new jobs

Options

• Multiple glass mask frame sizes
• Universal frame adaptor
• Integrated height tracker
• +2CD™ metrology – 2D measurement of circuit elements
• CDB™/CDBIC™ – defects classification and virtual defects mapping

Technical specifications

• Minimum detectable line/space width: 12.5 µm
• Inspection target: high-resolution phototools including film artworks and glass masks
• Illumination / optical path: transmissive light inspection (same light path as used in mask usage)
• Table: clear or matte glass table
• Frame compatibility: compatible with a wide range of frames; multiple glass mask frame sizes available as option
• Mechanical: robust mechanical structure with highly ergonomic design
• Image acquisition: state-of-the-art image acquisition hardware
• Processing: high-performance image processing firmware and powerful processors to handle large data volumes
• Software / detection engine: powered by Spark™ cross-platform detection engine with customizable detection algorithms
• Setup: fast and intuitive setup for new jobs
• Optional metrology and classification: +2CD™ 2D metrology, CDB™/CDBIC™ defects classification and virtual defects mapping
• Optional hardware: universal frame adaptor, integrated height tracker