DescriptionSVS 5μ is a CIMS AVI verification station powered by Sprint™ for verification of IC substrate strips scanned by AVI systems. It is optimized for inspection of line/finger widths in the 5–8 µm range and provides precise verification and marking capabilities.
Highlights- Flexible video illumination configurations (reflective/coaxial plus three diffusive channels)
- Automated material calibration
- Stationary vacuum table for stable handling
- Ergonomic workstation layout
- Optimized defect-to-defect movement for throughput
- Clear defect imaging with adjustable video lighting
Options- Integrated barcode reader
- Adjustable monitor position
- CDB™ / CDBIC™ for defect classification and virtual defect mapping
Technical specifications- Application: AVI verification for IC substrate strips
- Optimized technology: verification of 5–8 µm line/finger widths
- Illumination: reflective/coaxial channel plus three diffusive channels for contrast on gold and solder mask
- Optics: allows defect marking and scrapping of defective units
- Mechanics & hardware: robust design for high throughput
- User interface & ergonomics: intuitive interface, minimal training required
- Compatibility: powered by Sprint™; compatible with CDB™ and CDBIC™; compatible with all CIMS AVI systems and third‑party laser marking machines