Optical inspection machine AIVR 5μ

videofor semiconductorsfor patterned wafers

Description
AIVR is a CIMS AI-powered verification station that combines virtual and physical verification within a single workstation. The CIMS AIVR 5μ is designed to support high-volume manufacturing of IC substrates and is optimized for verification of 5–25 µm line/space technology. In AIVR mode, the operator reviews defect images captured by AOI and processed with AI-based image enhancement algorithms, enabling rapid filtering of obvious false calls. Using AIVR improves verification efficiency and speed while integrating results with the production database. An optional touchscreen enables fast defect classification and real-time QA feedback. AIVR 5μ is compatible with all CIMS AOI.

Highlights

• Combines verification of AOI post-processed images with live video mode
• Up to 90% increase in verification efficiency versus traditional mode
• Displays AI-enhanced high-resolution color defect images captured directly from AOI
• Variable zoom and automated calibration
• Stationary vacuum table
• Ergonomic design
• Clear defect image with adjustable video illumination

Options

• Auto-marker for marking defects
• Barcode reader
• Adjustable monitor arm
• CDB™/CDBIC™ – defects classification and virtual defects mapping
• SharpLight™ – enhanced video image

Technical specifications

• Model: AIVR 5μ
• Application: AI-powered AOI verification station for IC substrates
• Supported line/space width technology: 5–25 µm
• Verification modes: virtual and physical verification within a single workstation; AOI post-processed images and live video
• Features: AI-based image enhancement, variable zoom, automated calibration, stationary vacuum table, ergonomic design, adjustable video light
• Compatibility: Compatible with all CIMS AOI
• Optional touchscreen for defect classification and real-time QA feedback
• Options: Auto-marker, Barcode reader, Adjustable monitor arm, CDB™/CDBIC™, SharpLight™