OverviewThe NUCLEUS is a multi-purpose precision pick & place tool designed for 2.5D, fan-out and embedded packaging processes. It supports face-up and face-down operation with both local and global alignment for high-accuracy component placement.
Applications- Fan-out wafer-level packaging (FOWLP) and embedded die integration
- Flip-chip and direct die-attach processes, including flux dipping
- Handling of bare wafer substrates, wafer-on-carrier and substrate-on-carrier workflows
- High-bond-force and thermal bonding applications
Key features- Precise local and global alignment capable of sub-micron placement accuracy
- Face-up and face-down operation modes to support varied assembly flows
- Direct handling of bare dies and wafers, compatible with carriers
- Automatic tool changing system enabling multi-chip bonding and fast format changeover
- Support for high bond forces and integrated thermal process control
- Flux-dipping option for direct die attach and flip-chip bonding
- Class 100 cleaning standard during bonding to meet contamination-sensitive processes
Other configurations catering to the market- NUCLEUS XD: extra-large die handling capability up to 70 mm × 70 mm
- NUCLEUS XLplus: extra-large substrate handling capability up to 600 mm × 670 mm
Technical specifications- Multi-purpose precision pick & place for 2.5D, fan-out and embedded applications
- Operation: face up and face down
- Alignment: local and global alignment systems
- Process support: flip-chip, direct die attach (including flux dipping), high bond force and thermal bonding
- Handling: bare wafer substrate, wafer on carrier, substrate on carrier
- Automation: automatic tool changer for multi-chip bonding
- Cleanliness: Class 100 standard during bonding
- Optional large-format configurations: NUCLEUS XD (≤ 70 mm × 70 mm die), NUCLEUS XLplus (≤ 600 mm × 670 mm substrate)