Capacitance diaphragm vacuum gauge SPG

digitalanalogwithout display

The SPG5A-6A is a capacitance diaphragm vacuum gauge that uses a sapphire capacitance pressure sensor to achieve high accuracy and reliability, compact size, and light weight. Self-heating and nonself-heating models are available. The SPG5A/6A is especially suited for use in semiconductor manufacturing. Features * - Uses a single-crystal sapphire for excellent resistance to corrosion and high temperatures Highly corrosion-resistant and heat-resistant single-crystal sapphire pressure sensing material also has excellent mechanical characteristics. Capacitive measurement has high repeatability even when used at high temperature * - Highly accurate measurement Advanced signal processing technology contributes to excellent temperature characteristics and linearity of measurement * - Compact and light weight Small in size and light in weight, thanks to micromachining technology * - Fast warm-up time and stable sensor temperature control Microprocessor-based digital PID control provides fast warm-up and stable sensor temperature (self-heating models).