Capacitance diaphragm vacuum sensor V8C

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Are you also seeking a unique blend of durability and measurement stability?
 
Capacitive diaphragm gauges are essential for high-precision vacuum measurement. In deposition processes, a vacuum sensor zero-point shift can affect process accuracy and equipment operating rate, so a stable output is required.
 
The sapphire capacitance diaphragm gauges, Model V8C/V8S, of Azbil have been developed to address these issues. Using MEMS processing technology to form fine grooves (uneven structures) on the sensor diaphragm’s surface reduces the effects of stress caused by deposits. It prevents deformation of the diaphragm and the occurrence of zero shifts.
 
Additionally, the pressure-receiving part uses single-crystal sapphire, offering high corrosion resistance and mechanical strength.
 
This combination of durability and measurement stability improves equipment yield and reduces maintenance requirements.