Stylus surface profiler NS200

surface roughnesscontrollaboratory

Stylus Nano Profiler NS200 is a contact measuring instrument for surface roughness, microscopic profile measurement, micro‑nano step height and film thickness measurement. It uses a sub-angstrom displacement sensor, ultra-low noise acquisition, fine motion control and advanced calibration algorithms to provide very small contact force and applicability across varied surface reflections, materials and hardness — suitable for semiconductor, LED, solar, MEMS, touch panel, automotive and medical equipment inspection.

Application

• Semiconductor
  • Step height of deposited film
  • Step height of thin film resist
  • Etch rate measurement
  • Chemico-mechanical polishing (corrosion, pitting, bending)
• Large substrate
  • PCB protrusion and step height
  • Window coating
  • Wafer mask
  • Wafer chuck coating
  • Polishing plate
• Glass substrate and display
  • AMOLED
  • Step height measurement during LCD development
  • Thickness measurement for touch panel film and solar coating thin films
• Film on flexible components
  • Organic photodetector
  • Organic films printed on film and glass
  • Touch screen copper traces

Characteristics / technical specifications

• Model No.: NS200 (also available NS200-D)
• Sample observation - Front view navigation: 5MP color camera F.O.V. 2.2 × 1.7 mm (NS200) / 5MP color camera F.O.V. 10 × 13.4 mm (NS200-D)
• Sample observation - Side view navigation: 5MP color camera F.O.V. 2 × 2.68 mm (NS200-D), not applicable for NS200
• Sensor: Ultra low inertia, LVDC sensor
• Measuring force: 1–50 mg adjustable
• Stylus: Tip radius 2 μm, angle 60°
• XY travel range: Motorized X/Y 150 mm × 150 mm, manually adjustable leveling
• Sample R-θ stage: Motorized, continuous rotation 0–360°
• Vacuum chuck: 6-inch vacuum chuck
• Single scan length: 55 mm
• Max scanning range: 150 mm (XY travel) + 55 mm scanning range; maximum range 8"
• Max sample height: 50 mm
• Max wafer size: 200 mm (8")
• Step height repeatability*: 5 Å @ range 330 μm / 10 Å @ range 1 mm (measure step height 1 μm, 1δ)
• Sensor range: 330 μm or 1050 μm (330 μm probe is magnetic; choose 330 μm unless ultra-large range required)
• Scanning speed: 2 μm/s to 10 mm/s
• Max scan sampling points: 12,000
• Size (L × W × H): NS200: 640 × 610 × 500 mm; NS200-D: 640 × 650 × 530 mm
• Weight: 40 kg
• Input: AC 100–240 V, 50/60 Hz, 200 W
• Working environment: Humidity 30–40% RH (no condensation); Temperature 16–25 °C (fluctuation < 2 °C/h); Ground vibration: 6.35 μm/s (1–100 Hz); Audio noise ≤ 80 dB; Air laminar flow ≤ 0.508 m/s (downward flow)
• Notes: Repeatability data measured in a VC-C standard laboratory with an anti-vibration table; if these conditions are not met, repeatability data will be doubled.