Semiconductor inspection device

Facing the upstream raw material manufacturing enterprises and the midstream wafer manufacturing enterprises in the semiconductor industry chain, the independent developed optical bright and dark field detection system is used to detect the appearance defects of semiconductor raw materials, epitaxial wafers and patterned wafers. Product advantages: • Applicable to a variety of wafers           Suitable for 4-8 inch wafers, substrates, epitaxial wafers and patterned wafers • Can detect a variety of defects           Detect particles, pits, bumps, scratches, stains, cracks and other defects • High resolution           System resolution: 1-10 μ m  • Fast detection speed           No pattern wafer: 180 seconds / wafer when the number of defects is less than 200