Wafer spin coater VTC-100PA

VTC-100PA is CE certified tabletop spin coating device dedicated to spin coat small substrates up to 100 mm diameter at Max. 10000 rpm. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has a user-friendly keyboard and LCD display for programming various parameters up to 12 programs, 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion protected to make it cleanroom compatible. Main Features 500 ~ 10000 RPM spinning speed programmable Accept substrate from 5 mm to 5" PP chamber for anti-corrosive operation. One gas inlet port on top of cover which can fill inert gas during coating One 20ml Plastic Syringe is included Suitable using Ar gas ( vacuum pump must be outside glovebox) Safety interlock is integrated into the lid Vacuum Chuck & Vacuum pump Chamber size: 150 mm diameter 2 sets of PP anti-corrosive vacuum chucks with different sizes (Φ44mm, Φ9mm), which can hold substrate from 5 mm to 5" Dia. ( see pic below ) Click the picture below right to watch demo video for how to use 9mm vacuum chuck hold 5mm sample. One 120L/min Oilless Vacuum Pump is included in the standard package, please click the picture below for specification details. Programmable Control Duration up to 60 seconds Acceleration: 100 - 2000 rpm / sec adjustable Accuracy: < 5% Digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration (please click picture below-right to see typical program setting)