Thermal flow meter FF-103 FLEXI-FLOW

massfor gasglass

Key Features

• 8 pre-installed gases, 22 gases available via Bronkhorst FlowSuite
• Flow and Temperature measurement
• Compact design
• Up to 16 bar(g)
• Bluetooth and USB-C connection with free software Bronkhorst FlowSuite
• Fast response due to TCS technology

Pre-installed gases and maximum ranges
Gases | max. range
N₂, Air, H₂ | 50 mln/min
O₂ | 45 mln/min
Ar, CH₄ | 40 mln/min
He | 70 mln/min
CO₂ | 35 mln/min

Multi-fluid capability
With free software Bronkhorst FlowSuite you can add one of the 22 available gases or create mixtures on to the instrument. This way you have a multi fluid instrument for your application: C₂H₂, Air, C₃H₄ #1, Ar, CO₂, CO, C₃H₆ #1, D₂ #1, C₂H₆, C₂H₄, He, H₂, Kr, CH₄, Ne, N₂, N₂O, O₂, C₃F₈, C₃H₆ #2, C₃H₈, C₃H₄ #2.
You can easily connect the instrument to your phone via Bluetooth and use it with the app. Alternatively, the instrument can be connected to a PC using the appropriate cables.

Features of FF-103 FLEXI-FLOW 50 mln/min

• Multi parameter output: Actual mass flow and Temperature (instrument)
• Usable for virtually every kind of gas or gas-mix
• Simple and secure connection through Bluetooth or USB-C
• Advanced diagnostics functionalities
• High accuracy through on-board gas database and real-time conversion
• Easy to configure
• MTBF 145 years
• Unique TCS (Through Chip Sensor)
• Fast response <30ms
• Compact design
• Namur NE107 status indication

Applications

• Reactive sputtering
  • Fast follow-up of setpoints for layer thickness and transparency control
  • Large dynamic range for flexibility within the application
• Analytical equipment
  • Trace Elemental Analysis, Gas Chromatography, ICP Spectroscopy, OES Spectroscopy, Mass Spectrometry
  • Excellent repeatability and long-term stability
  • Analytical grade; low outgassing. Fast flow control, also at very low flow rates.
• Fuel cell
  • Very accurate and repeatable over short-term and long-term for H₂, Air, O₂ and CO₂ flow measurement and control
  • Fast response flow measurement and control for accuracy at any time
  • Large dynamic range flow measurement and control for accuracy over a wide flow range
  • Compact for space-restricted mobile applications

Technical specifications

• Measurement / control system:
  • Flow range: 1...50 mln/min
  • Accuracy: ±1.5% Rd plus ±0.5% FS (At calibration conditions)
  • Repeatability: < ± 0.2% Rd
  • Turndown ratio: 1:50
  • Pressure rating (PN): 16 bar(g) (232 psi(g))
  • Temperature rating: 0 … 50 °C (32°F … 122°F)
  • Operating pressure: 0.8 … 17 bar(a)
  • Pre-installed gases: Air, N₂, O₂, H₂, Ar, He, CH₄, CO₂ (embedded gas data for 22 unique gases plus any mixture of these gases)
  • Standard calibration gas: N₂
  • Response time (sensor): <30 ms
  • Temperature coefficient: Flow sensor: zero 0.015% FS/ºC; span 0.05% Rd/ºC
  • Leak integrity, outboard: Typical < 2 x 10⁻⁹ mbar l/s He
  • Attitude sensitivity: Mounting any position, attitude sensitivity negligible
• Mechanical parts:
  • Material (wetted parts): aluminium, stainless steel, silicon nitride, epoxy, aluminiumoxide, glass
  • Test pressure: 25 bar(g)
  • Process connections: G1/8”BSSP ISO 1179 cavities
  • Sealing material: FKM 51415
  • Weight: 250 grams
  • Ingress protection: IP40
• Electrical properties:
  • Power supply: +24 VDc ± 10%
  • Max. power consumption: 0.5 Watt
  • Digital Communication: Modbus-RTU / FLOW-BUS
  • Electrical connection: 9-pin D-sub male