Mass flow meter FF-101 FLEXI-FLOW

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Overview

• 8 pre-installed gases, 22 gases available via Bronkhorst FlowSuite
• Flow and Temperature measurement
• Compact design
• Up to 16 bar(g)
• Bluetooth and USB-C connection with free software Bronkhorst FlowSuite
• Fast response due to TCS technology

Pre-installed gases
Gases | max. range
N₂, Air, H₂ | 5 mln/min
O₂ | 4.5 mln/min
Ar, CH₄ | 4 mln/min
He | 7 mln/min
CO₂ | 3.5 mln/min

With free software Bronkhorst FlowSuite you can add one of the 22 available gases or create mixtures on to the instrument. This way you have a multi fluid instrument for your application: C₂H₂, Air, C₃H₄ #1, Ar, CO₂, CO, C₃H₆ #1, D₂ #1, C₂H₆, C₂H₄, He, H₂, Kr, CH₄, Ne, N₂, N₂O, O₂, C₃F₈, C₃H₆ #2, C₃H₈, C₃H₄ #2.
You can easily connect the instrument to your phone via Bluetooth and use it with the app. Alternatively, the instrument can be connected to a PC using the appropriate cables.

Features of FF-101 FLEXI-FLOW 5 mln/min

• Multi parameter output: Actual mass flow and Temperature (instrument)
• Usable for virtually every kind of gas or gas-mix
• Simple and secure connection through Bluetooth or USB-C
• Advanced diagnostics functionalities
• High accuracy through on-board gas database and real-time conversion
• Easy to configure
• MTBF 145 years
• Unique TCS (Through Chip Sensor)
• Fast response <30ms
• Compact design
• Namur NE107 status indication

Technical specifications
Measurement / control system
Flow range | 0.1...5 mln/min
Accuracy | ±1.5% Rd plus ±0.5% FS (At calibration conditions)
Repeatability | < ± 0.2% Rd
Turndown ratio | 1:50
Pressure rating (PN) | 16 bar(g) (232 psi(g))
Temperature rating | 0 … 50 °C (32°F … 122°F)
Operating pressure | 0.8 … 17 bar(a)
Pre-installed gases | Air, N2, O2, H2, Ar, He, CH4, CO2 (embedded gas data for 22 unique gases plus any mixture of these gases)
Standard calibration gas | N2
Response time (sensor) | <30 ms
Temperature coefficient | Flow sensor: zero 0.015% FS/ºC; span 0.05% Rd/ºC
Leak integrity, outboard | Typical < 2 x 10-9 mbar l/s He
Attitude sensitivity | Mounting any position, attitude sensitivity negligible

Mechanical parts
Material (wetted parts) | aluminium, stainless steel, silicon nitride, epoxy, aluminiumoxide, glass
Test pressure | 25 bar(g)
Process connections | G1/8”BSSP ISO 1179 cavities
Sealing material | FKM 51415
Weight | 250 grams
Ingress protection | IP40

Electrical properties
Power supply | +24 VDc ± 10%
Max. power consumption | 0.5 Watt
Digital Communication | Modbus-RTU / FLOW-BUS
Electrical connection | 9-pin D-sub male

Applications

• Reactive sputtering
  • Fast follow-up of setpoints for layer thickness and transparency control
  • Large dynamic range for flexibility within the application
• Analytical equipment
  • Trace Elemental Analysis, Gas Chromatography, ICP Spectroscopy, OES Spectroscopy, Mass Spectrometry
  • Excellent repeatability and long-term stability
  • Analytical grade; low outgassing. Fast flow control, also at very low flow rates.
• Fuel cell
  • Very accurate and repeatable over short-term and long-term for H2, Air, O2 and CO2 flow measurement and control
  • Fast response flow measurement and control for accuracy at any time
  • Large dynamic range flow measurement and control for accuracy over a wide flow range
  • Compact for space-restricted mobile applications

Characteristics / Technical Specifications

• Model: FF-101 FLEXI-FLOW
• Flow range: 0.1...5 mln/min
• Accuracy: ±1.5% Rd plus ±0.5% FS
• Repeatability: < ± 0.2% Rd
• Turndown ratio: 1:50
• Pressure rating: 16 bar(g)
• Temperature rating: 0 … 50 °C
• Operating pressure: 0.8 … 17 bar(a)
• Pre-installed gases: Air, N2, O2, H2, Ar, He, CH4, CO2
• Standard calibration gas: N2
• Response time: <30 ms
• Temperature coefficient: Flow sensor: zero 0.015% FS/ºC; span 0.05% Rd/ºC
• Leak integrity: Typical < 2 x 10-9 mbar l/s He
• Attitude sensitivity: Mounting any position, attitude sensitivity negligible
• Material (wetted parts): aluminium, stainless steel, silicon nitride, epoxy, aluminiumoxide, glass
• Test pressure: 25 bar(g)
• Process connections: G1/8”BSSP ISO 1179 cavities
• Sealing material: FKM 51415
• Weight: 250 grams
• Ingress protection: IP40
• Power supply: +24 VDc ± 10%
• Max. power consumption: 0.5 Watt
• Digital Communication: Modbus-RTU / FLOW-BUS
• Electrical connection: 9-pin D-sub male