Chromatic confocal sensor confocalDT IFS2407-xHT/VAC

for thickness measurementfor distance measurementnon-contact

Overview
The confocalDT IFS2407 confocal chromatic high-temperature sensors provide reliable non-contact distance and displacement measurement in demanding environments. Designed for operation up to 200 °C, the HT/VAC versions combine compact optics with low outgassing for UHV compatibility. Variants include multiple measuring ranges and optional 90° beam-path versions to accommodate restricted installation spaces.

Key features

• Reliable operation at ambient temperatures up to 200 °C
• Low outgassing: suitable for UHV and clean-room applications
• Compact confocal chromatic sensor design for limited installation space
• Available in multiple measuring ranges and variants, including 90° beam path
• Stainless steel housing (material 1.4404)

Models and main specifications

• confocalDT IFS2407-0,8HT/VAC
  • Measuring range (mm): 0.8
  • Linearity: max. < ±0.18 µm
  • Resolution: max. < 6 nm
  • Low outgassing: suitable for UHV and clean-room applications
  • Reliable measurement at temperatures up to 200 °C
  • Stainless steel housing 1.4404
• confocalDT IFS2407-2HT/VAC
  • Measuring range (mm): 2
  • Linearity: max. < ±0.44 µm
  • Resolution: max. < 10 nm
  • Low outgassing: suitable for UHV and clean-room applications
  • Reliable measurement at temperatures up to 200 °C
  • Stainless steel housing 1.4404
  • Models available with 90° beam path
• confocalDT IFS2407-4HT/VAC
  • Measuring range (mm): 4
  • Linearity: max. < ±0.8 µm
  • Resolution: max. < 24 nm
  • Low outgassing: suitable for UHV and clean-room applications
  • Reliable measurement at temperatures up to 200 °C
  • Stainless steel housing 1.4404
  • Models available with 90° beam path

Applications

• Precision machine building
• Semiconductor industry
• UHV applications and clean-room environments

Technical specifications

• Series / model family: confocalDT IFS2407
• Available measuring ranges: 0.8 mm, 2 mm, 4 mm
• Maximum linearity (model dependent): < ±0.18 µm (0.8 mm) — < ±0.44 µm (2 mm) — < ±0.8 µm (4 mm)
• Maximum resolution (model dependent): < 6 nm (0.8 mm) — < 10 nm (2 mm) — < 24 nm (4 mm)
• Operating temperature capability: up to 200 °C
• Vacuum compatibility / low outgassing: suitable for UHV
• Housing material: stainless steel 1.4404
• Variants: straight and 90° beam-path versions available