Overview
The capacitive TFG6220 system measures the thickness of electrically conductive films (e.g. battery films) with high precision. A vacuum device holds and smooths the sample to provide a wrinkle‑free reference surface. The unit is pre‑assembled for quick deployment and intended for offline random‑sample quality inspection.
Key functionality
- Vacuum smoothing of the film to remove wrinkles and ensure repeatable positioning
- Measuring bracket with two capacitive sensors and an integrated measuring insert for simple referencing
- Data acquisition and visualization via sensorTOOL (web interface)
Applications
Offline, fast inspection of conductive film thickness for quality control and process monitoring, e.g. battery films.
Technical specifications
- Resolution: 10 nm
- Repeatability: 1 µm
- Measurable film thickness: < 1 mm
- Measuring principle: evaluating the readings of the two capacitive sensors
- Sample handling: external vacuum device for smoothing and clamping
- Configuration: pre‑assembled, ready for operation
- Software: sensorTOOL for visualization and settings