Linear displacement sensor capaNCDT 6500

non-contactcapacitiveEtherCAT

Capacitive displacement sensors are designed for measurement tasks that require extremely high precision. The capaNCDT 6500 capacitive multi-channel system is ideally suited to reliable measurements down to sub-nanometer resolution. The controller offers a maximum response rate of 7.8kHz (digital, with up to four channels) or a frequency response of 8.5kHz. As well as an analog output, an EtherCAT(R) interface is also available. EtherCAT enables accurate data transmission in real time, with high speed integration into the existing measurement environment and synchronization of two systems. Set up and configuration of the capaNCDT 6500 system are carried out easily using a web browser. Characteristics • Measuring ranges (mm): • 0.05 | 0.2 | 0.5 | 0.8 | 1 | 2 | 3 | 5 | 10 • Resolution max. 0.0375nm • Linearity max. 0.01µm • Frequency response 8.5kHz (-3dB) • Data rate (digital output) 7.8kHz • Analog output (voltage/current) • Ethernet, EtherCAT • Modular – up to 8 channels • External or internal preamplifier • User-friendly set up and configuration via web interface Maximum resolution The capaNCDT 6500 system is designed for measurements tasks that require sub-nanometer resolution. Its strengths are demonstrated particularly well in positioning tasks in the semiconductor industry and laboratory applications. The modular capaNCDT 6500 is designed for multi-channel applications. Up to eight sensors can be connected via a preamplifier to the signal conditioning electronics. Ease of use via web interface Due to a user-friendly web interface, the entire configuration process of controller and sensors is carried out without using any additional software.