- Hydraulics - Pneumatics
- Valve
- Gate valve
- VAT Vakuumventile AG
Gate valve 031 seriespneumaticlockablefor the semiconductor industry
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Characteristics
- Type
- gate
- Operation
- pneumatic
- Body
- lockable
- Applications
- for the semiconductor industry
- Material
- aluminum
- Associated function
- transfer
- Other characteristics
- double-acting
- DN
Max.: 420 mm
(16.535 in)Min.: 32 mm
(1.26 in)- Pressure
Max.: 7 bar
(101.5 psi)Min.: 3 bar
(43.5 psi)- Temperature
Max.: 40 °C
(104 °F)Min.: 0 °C
(32 °F)
Description
For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers. - Mechanically locked in closed position - Low shock - Differential pressure tabs PEEK instead standard SUS (option)
Catalogs
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See all of VAT Vakuumventile AG‘s catalogsOther VAT Vakuumventile AG products
Transfer valves and doors for SEMI
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