- Hydraulics - Pneumatics
- Valve
- Gate valve
- VAT Vakuumventile AG
Gate valve 032 seriespneumaticlockablefor the semiconductor industry
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Characteristics
- Type
- gate
- Operation
- pneumatic
- Body
- lockable
- Applications
- for the semiconductor industry
- Material
- aluminum, stainless steel
- Associated function
- transfer
- Other characteristics
- double-acting
- DN
Min.: 32 mm
(1.26 in)Max.: 500 mm
(19.685 in)- Pressure
Min.: 3 bar
(43.5 psi)Max.: 7 bar
(101.5 psi)- Temperature
Min.: 0 °C
(32 °F)Max.: 40 °C
(104 °F)
Description
For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers. - Low shock - Protected bellows - Long life time - locked pneumatically (option) - easy gate exchange
Catalogs
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See all of VAT Vakuumventile AG‘s catalogsOther VAT Vakuumventile AG products
Transfer valves and doors for SEMI
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.