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Gate valve 053 seriespneumaticaluminumfor the semiconductor industry
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Characteristics
- Type
- gate
- Operation
- pneumatic
- Body
- aluminum
- Applications
- for the semiconductor industry
- Other characteristics
- double-acting, for corrosive environments
- DN
50 mm, 336 mm, 480 mm, 500 mm
(1.969 in, 13.228 in, 18.898 in, 19.685 in)- Pressure
Max.: 7 bar
(101.5 psi)Min.: 4 bar
(58 psi)- Temperature
Max.: 120 °C
(248 °F)Min.: 0 °C
(32 °F)
Description
For load lock / process module isolation. For 300mm and 450mm semiconductor applications.
Actuator
Other solenoid valve voltage (standard 24VDC)
Insert
Other sealing materials, e.g. FFKM, VMQ, FVMQ gate seal
O-ring seal in gate instead of the vulcanized seal (standard)
Gate stainless steel
Double position indicator
Catalogs
No catalogs are available for this product.
See all of VAT Vakuumventile AG‘s catalogsOther VAT Vakuumventile AG products
Transfer valves and doors for SEMI
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.