Brooks instruments flow meters

1 company | 20 products
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thermal mass flow meter
thermal mass flow meter
GF40 Series

Process pressure: 0 bar - 10 bar
Process temperature: 5 °C - 50 °C

... Thermal Mass Flow Controllers & Meters One device. Multiple gases and flows. Maximum flexibility. Models GF40 Multiple gases in one device equals maximum process flexibility ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
GF125 Series

Process pressure: 0 bar - 10.34 bar
Process temperature: 0 °C - 50 °C

... controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
GF100 Series

Process pressure: 0 bar - 34.47 bar
Process temperature: 0 °C - 50 °C
Volumetric flow rate: 0 l/min - 300 l/min

... levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control ...

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Brooks Instrument
mass flow meter
mass flow meter
Quantim Series

Process pressure: 10 psi - 200 psi
Process temperature: 0 °C - 65 °C

... Coriolis Mass Flow Controllers & Meters The industry standard for low-flow Coriolis measurement and control. Models QMBC2 / QMBM2 / QMBC3 / QMBM3 / QMBC4 / QMBM4 Achieve superior ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
SLAMf Series

Process temperature: -14 °C - 65 °C

SLAMf Series Elastomer Sealed Thermal Mass Flow Controllers & Meters Precision mass flow control. Hardened for the harshest environments. Now available with EtherNet/IP™ Models ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
9861 Series

Process pressure: max 90.0 psi
Process temperature: max 150.0 °C

9861 Series High Temperature Mass Flow Controllers & Meters Improve high temperature flow control accuracy and efficiency. Models 9861 Engineered for the challenging ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
5850E & i Series

Process pressure: 0 psi - 1,500 psi
Process temperature: 0 °C - 65 °C
Volumetric flow rate: 0 l/min - 1,000 l/min

... 0.2% full scale per year • Fast flow response to command changes with negligible overshoot/undershoot • Wide range of flow ratings - from 3 sccm up to 1000 slpm • High pressure rating - up to 1,500 ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
4800 Series

Process pressure: 0 bar - 10 bar
Process temperature: 5 °C - 50 °C
Volumetric flow rate: 40 l/min

4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters Ultra-fast response for time-critical flow processes. Models 4850 / 4860 The faster your thermal mass flow ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
5700 Series

Process pressure: 0 psi - 150 psi
Process temperature: 0 °C - 65 °C
Volumetric flow rate: 0 l/min - 50 l/min

5700 Series Elastomer Sealed Mass Flow Meters Cost-effective gas flow metering for targeted applications. Models 5700 When you need a compact, economical mass flow ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
GF80 Series

Process pressure: 7 psi - 90 psi
Process temperature: 0 °C - 50 °C
Volumetric flow rate: 0 l/min - 300 l/min

GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters Raises the standard in performance for value-driven metal sealed applications. Models GF80 For many industrial and semiconductor ...

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Brooks Instrument