Thermal mass flow meter GF80
for gasstainless steelRS485

thermal mass flow meter
thermal mass flow meter
thermal mass flow meter
thermal mass flow meter
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thermal mass
for gas
stainless steel
4-20 mA, RS485, PROFIBUS
Supply voltage
24VDC, 12VDC, 5VDC
Protection level
Other characteristics
Volumetric flow rate

Min.: 0 l/min (0 us gal/min)

Max.: 300 l/min (79.3 us gal/min)

Process temperature

Min.: 0 °C (32 °F)

Max.: 50 °C (122 °F)

Process pressure

Min.: 7 psi

Max.: 90 psi


0.35 %, 1 %


0.2 %


GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters Raises the standard in performance for value-driven metal sealed applications. For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology as our best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point. Moving to a metal sealed MFC brings the full benefit of MultiFloTM multi-gas/multi-range capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely. Features • Long-term zero stability of <±0.5% full scale per year • <1 second settling times • All-metal seal flow path - 16µ inch Ra surface finish • Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition • Programmable MultiFloTM capability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy • Best-in-class temperature coefficient specification through active temperature compensation • Embedded self-test routines and independent diagnostic/service port • Slimline body with VCR fittings • DeviceNetTM, Profibus®, RS-485 and analog interfaces


*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.