Thermal flow meter 9861

massfor gasstainless steel

high-temperature mass flow controllers (MFCs) and meters are designed to control and measure the mass flow rate of vapor from liquid or solid sources to support the growing usage of these precursors in semiconductor manufacturing processes. The flow module on GF120xHT can withstand operating environments of up to 150°C. To support this temperature range, the electronics are remotely connected to the rest of the device and mounted in a lower temperature location (max 50°C). The remote electronics can be DIN mounted with a choice of three different interconnecting cable lengths - 3 ft, 8 ft, and 16.5 ft standard. The wide range of communication protocols and fitting options make GF120xHT an ideal choice for next generation process equipment and upgrade for legacy heated MFCs. Features Designed for high-temperature applications up to 150°C Convenient service port provides access to diagnostics via user-friendly interface Corrosion-resistant Hastelloy sensor Calibrated to the customer's process conditions Benefits Ability to support applications up to 150°C for liquid precursor vapor delivery User-friendly diagnostics interface supports process engineer in ensuring MFC is operating within the specified limits for high-yield and maximum uptime Provides unmatched long-term sensor stability for maximum throughput and yields Calibrated at customer operating temperature and pressure for optimal performance