Thermal flow meter 5850EM

massfor gasin-line

Proven long-term stability. Ultra-pure performance for high pressure applications. 5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow. Features • Long-term zero stability of <0.2% full scale per year • <3 seconds settling time to command changes with negligible overshoot/undershoot • Optional enhanced process internal finish - 5µ inch Ra avg • Removable flow sensor • Insensitive to mounting attitude • Mechanically and electrically compatible with other mass flow controllers • TTL compatible "valve off" and purge function Benefits All-metal flow path enhances gas purity and reduces leaks Proven long-term stability and accuracy across broad process and application range Excellent return on investment due to reliable performance Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures Easily installed and serviced with analog only input/outputs Applications Fiber Optic LED / MOCVD Semiconductor Solar