Thermal mass flow meter GF125 Series
for gasin-linecorrosion-resistant

thermal mass flow meter
thermal mass flow meter
thermal mass flow meter
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thermal mass
for gas
Protection level
Other characteristics
Process pressure

Min.: 0 bar (0 psi)

Max.: 10.34 bar

Process temperature

Min.: 0 °C (32 °F)

Max.: 50 °C (122 °F)


GF125 Series Metal Sealed Thermal Mass Flow Controllers & Meter Models GF125 / GF125HA / GF126 Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy. The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity Features • Long-term zero stability of <±0.5% full scale per year • Ultra-fast settling times: 300 ms - <700 ms • Full-scale flow rates up to 300 slpm • Ultra-high purity flow path - 4µ inch Ra surface finish • SEMI F20 compliant wetted materials • Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor • Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures • MultiFloTM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy • Local display indicates flow, temperature, pressure and network address for easy troubleshooting of gas supply and isolation valve issues


GF125 Series
GF125 Series
12 Pages
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