GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters
One device. Multiple gases and flows. Maximum flexibility.
Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
• Programmable multi-gas/multi-range capabilities
• Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
• Sub-1 second flow response time and accuracy of 1% set point for demanding applications
• Well suited for a variety of gases
• Fast response, Hastelloy sensor
• Easily accessible diagnostic service port is independent of tool communication
• Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface