Thermal mass flow meter GF40 Series
for gasprogrammablecombined

thermal mass flow meter
thermal mass flow meter
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thermal mass
for gas
Other characteristics
programmable, combined
Process pressure

Max.: 10 bar (145.04 psi)

Min.: 0 bar (0 psi)

Process temperature

Max.: 50 °C (122 °F)

Min.: 5 °C (41 °F)


GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters One device. Multiple gases and flows. Maximum flexibility. Models GF40 Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance. Features • Programmable multi-gas/multi-range capabilities • Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions • Sub-1 second flow response time and accuracy of 1% set point for demanding applications • Well suited for a variety of gases • Fast response, Hastelloy sensor • Easily accessible diagnostic service port is independent of tool communication • Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface


GF40 Series
GF40 Series
12 Pages
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