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The Alicat line of Laminar Mass Flow Controller products utilize a proportional cock coupled to a mass flow meter body. These robust, closed-loop devices can accept and transmit 0-5Vdc, 0-10Vdc, 4-20mA or RS232 control signals. Flow controllers range from 0.5 CCM full scale to 1,500 SLPM full scale and all flow control devices include a dynamic digital display that simultaneously shows all the process parameters being measured by the meter plus a push button operator interface for set point adjustments, gas select and tare.
Common Applications for Alicat Mass flow regulation
• Micro-Electro Mechanical(MEMs)
• Nanotechnology
• Manufacturer of fuel cell
• Pharmaceutical Processing
• Biotechnology
• Phyiscal Vapor Deposition
• Chemcial Mechanical Polishing
• Carburizing
• Process driver
• Paint Applications
• Environmental/Atmospheric Testing
• Emissions Bench
Benefits of Alicat Mass Flow Controllers
• Fast Response Time 10ms
• Low Power Consumption
• Repeatable
• Reliable
• On Board Display
• Low Gas Consumption
• Accuracy +/- 1% of full scale
Now with an industry first, lifetime warranty! |
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AALBORG®'s GFC LOW COST self-contained ANALOG THERMAL MASS FLOW REGULATORS are designed to accurately measure and control the flowrates of gases. CONTROLLERS are constructed of rigid metallic components. Nylon is not used. Flowrates are unaffected by temperature and pressure variations.
Stainless steel models have wetted parts of stainless steel. Aluminum models have wetted parts of aluminum, brass and stainless steel. O-rings are VitonTM.
Local setpoint adjustments are conveniently accessible from the outside. External set point adjustments of the control valve are facilitated through a 15 pin D-connector. Control valves suppliers are normally closed proportionating electromagnetic cocks.
A tiltable LCD readout is built into the top of the meter. Readings are in direct engineering units in terms of specific gases. Remote reading installations are possible by means of an optional extension wire supplied with a modular phone plug. Conveniently overlapping flow ranges.
SPECIFICATIONS
Accuracy: ± 1.5% of full scale.
Repeatability: 0.5% of full scale.
Maximum Flow: 1000 sL/min [N2].
Response Time: Typically 2 seconds to within ± 2% of flow setting.
Maximum Gas Pressure: 500 psig / 34.5 bars. |
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The Brooks line of analog thermal mass flow instruments is designed to meet the rigorous demands of our customers’ established and newly developing process applications. These devices continue to add to their expansive installed base due to their fast response, excellent accuracy, and simple integration. Features include: years of field-proven reliability; analog I/O allows for quick and easy system integration; elastomer professional seals option provides exceptional leak integrity and maximizes control valve specification shutoff dependability; ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes. Globally approved for a variety of service areas.
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Gas Flow Meters with standard digital and analog output
The thermal mass flow meters and controllers of the smart series are especially well suited for measurement and control applications in industry and process as well as for customer-specific OEM applications. The products are provided with a multitude of features which can be easily optimized to meet a customer’s individual requirements.
Instrument versions
standard: The economic solution
(Accuracy +/- 1,5% of full scale, Turndown ratio 1 : 30)
hi-performance: With highest accuracy and turndown ratio
(Accuracy +/- 0,3% of full scale and +/- 0,5% of reading, Turndown ratio 1 : 100) |
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| The Brooks QUANTIM® Coriolis mass flow meter/controller offers unsurpassed accuracy and zero stability in critical low flow liquid and gas applications. QUANTIM combines the sensor, professional transmitter, control faucet and PID control electronics into one compact, integrated package, reducing space requirements, and simplifying purchase, installation, and start up. Features include: direct mass measurement is immune to fluid property variations, providing greater application flexibility and reducing spares; repeatable mass flow measurement and control even under changing conditions; multivariable output for mass flow or volumetric flow and density or temperature. Available in NEMA 1/IP40, NEMA 4X/IP65, explosion proof and ANSI/ISA SP-76 downport configurations. Globally approved for a variety of service areas. |
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AALBORG®'s unique microprocessor-driven "Smart" DIGITAL MASS FLOW CONTROLS allow one to program, record, analyze and control flow rates of various gases with a computer via an RS 485 interface.
Programmable for various control functions such as SET POINT, TOTALIZER, STOP TOTALIZER, READ TOTALIZER, totalize from PRESET FLOW, stop at PRESET TOTAL, AUTO ZERO, PROGRAMMABLE FLOW and more. Auto zero feature utilizes an automatic balancing circuit that virtually eliminates drift of zero and span. Two dry contact closures turn external process equipment ON and OFF. Gas flow rates are unaffected by temperature and pressure variations within stated limitations.
Extensive on-board memory enables each controller to store NIST traceable calibrations for up to ten gases. Controllers also have conversion factors for 256 different gases in hardware memory making this a most versatile flow controller.
SPECIFICATIONS:
Accuracy: +/- 1% of full scale.
Repeatability: +/- .15% full scale.
Maximum Flow: 100 sL/min [N2}
Maximum Gas Pressure: 500 psig / 34.5bars.
Leak Integrity: 1 x 10- 9 sccs He maximum.
Output Signal: 4 to 20 mA 0 to 5 VDC; 0 to 10 VDC |
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The thermal mass flow meters and controllers of the smart series are especially well suited for measurement and control applications in industry and process as well as for customer-specific OEM applications. The products are provided with a multitude of features which can be easily optimized to meet a customer’s individual requirements.
- Digital and analog interface as standard
- Fieldbus-Connections: Modbus, Profibus, etc.
- Insensitive to pressure and temperature changes
- CMOS sensor technology
- Short response time for meters and controllers
- High accuracy and turndown ratio
- Minimum pressure loss
- Temperature measurement as standard (digital)
- Compact design, simple installation
- Easy to service and maintain
- Materials: Aluminium or stainless steel
- Easy to add functions
- 3-year warranty
Process control Units PCU100 & PCU800 for the thermal Mass Flow Meters & Mass flow regulators 'red-y smart series' are ideally suited to power and control up to eight red-y mass flow meters and controllers.
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The Alicat Scientific LC Series Liquid Flow Controller utilizes a proportional cock coupled to a flow meter body creating a unique closed-loop flow controller system. LC Series Liquid Flow Controllers can be configured for single or dual output voltages and/or process signals such as flow and temperature or pressure. The LC Series has a dynamic digital display that simultaneously shows all the measured parameters within the meter plus a push button operator interface allows the user to select a specific parameter for the main display, make set point and control adjustments or tare the meter.
Common Applications for Alicat Liquid Flow Controllers
• Semiconductor
• Environmental Testing
• Pharmaceutical/Biotechnology
• Leak Testing
• Food/Beverage
• University/Laboratory
• Water flow totalization
• Gas humidification
Benefits of Alicat Liquid Flow Controllers
• Fast Response Time 20ms
• Low Power Consumption
• Repeatable
• Reliable
• On Board Display
• 50:1 Turndown Ratio
• Accuracy & Repeatability +/- 2%
Now with an industry first, lifetime warranty! |
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AALBORG®'s Model GFC THERMAL MASS FLOW REGULATION are designed to indicate and control set flow rates of gases.
The GFC combines the characteristics and accuracy of conventional mass flow devices into a unique compact design at low costs.
DESIGN FEATURES
-Totalizer option.
-Circuit protection.
-Maximum pressure of 500 psig (34.5 bars).
-Leak integrity 1 x 10-7 smL/sec of industrial helium.
-NIST traceable certification
-Rigid metallic construction
-0-5 Vdc and 4-20 mA signals.
-Built in tiltable LCD readout
-Local or remote setpoint control. |
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| The Brooks Mf™ Series mass flow instrument line is designed specifically for use in harsh environments. These devices’ unique enclosure provides protection from dust and water making them ideal for indoor or outdoor use. Features include: NEMA 4X/IP65 ratings affords washdown protection eliminating the need for secondary enclosures; industry leading repeatability ensures a stable process even under changing conditions; self diagnostics and alarms eliminate downtime; analog and digital versions allow simple integration into any control system; flow rates up to 36,000 lpm (meter) available to meet high rate industrial process requirements. EX-Series products feature remote electronics and are certified for Zone 1 hazardous areas. Globally approved for a variety of service areas. |
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Teledyne Hastings Thermal Mass Flowmeters and Mass flow controllers are designed for the precise measurement and control of vacuum and gas flows.
The current Models HFM Thermal Mass Flow meter and HFC Thermal Mass Flow Controller represent the culmination of more than 60 years experience in manufacturing quality mass flow instruments. The basic design incorporates removable/replaceable components to provide users a low cost of ownership, maximum flexibility, and reduced downtime.
The heart of the system is a replaceable sensor which virtually eliminates long downtimes due to clogging, the most common cause of failure in the industry. The modular design also offers adjustable range capabilities, in-line filtration, and replaceable electronics to allow users maximum flexibility in adjusting their system for changing requirements. Current designs can accommodate flow rates from 10 SCCM to 15,000 SLPM, fast responding or zero overshoot electronics.
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The thermal mass flow meters and controllers of the smart series are especially well suited for measurement and control applications in industry and process as well as for customer-specific OEM applications. The products are provided with a multitude of features which can be easily optimized to meet a customer’s individual requirements.
- Digital and analog interface as standard
- Fieldbus-Connections: Modbus, Profibus, etc.
- Insensitive to pressure and temperature changes
- CMOS sensor technology
- Short response time for meters and controllers
- High accuracy and turndown ratio
- Minimum pressure loss
- Temperature measuring as standard (digital)
- Compact design, simple installation
- Easy to service and maintain
- Materials: Aluminium or stainless steel
- Easy to add functions
- 3-year warranty |
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The precise regulation of the air flow into sewage basins does not only influence the optimal quality of your cleaning process but furthermore still saves pure money because the energy-intensive pneumatics is well applied in optimal quantities.
A too low oxygen supply leads to insufficient pollutant reduction and consequently to a reduced cleaning performance. In the worst case, an infringement of the desired limits occurs.
A too generous ventilation doesn’t bring any higher cleaning performance, but the energy costs for useless compresser performance can impair your installation effectiveness quite considerably.
Deltafit secures optimum oxygen input to your prozess, saves pure energy costs, works also under heaviest conditions for years without any maintenance – and fault-free. The optimally adapted components are prooving their precision and reliability in thousands of industrial installations in the entire process industry. The ready-to-go-setup components are ready mounted and do not need any startup efforts after installation!
Fluids: Air for sewage basins or combustion air in process industries
Pipe diameters: 65..500 mm (2,5”-20”) (others on request)
Process conditions: -40..250 °C (others on request)
0..10 bar (others on request)
Ultrapure to higly inpure air
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Gas Flow Controllers with integrated regulator
The thermal mass flow meters and controllers of the smart series are especially well suited for measurement and control applications in industry and process as well as for customer-specific OEM applications. The products are provided with a multitude of features which can be easily optimized to meet a customer’s individual requirements.
Instrument versions
standard: The economic solution
(Accuracy +/- 1,5% of full scale, Turndown ratio 1 : 30)
hi-performance: With highest accuracy and turndown ratio
(Accuracy +/- 0,3% of full scale and +/- 0,5% of reading, Turndown ratio 1 : 100) |
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The Brooks line of digital thermal mass flow instruments offers faster response, better accuracy and improved control over traditional analog devices. Features include: industry leading repeatability ensures a stable process even under changing conditions; self diagnostics and alarms eliminate downtime; multiple communication protocols allow easy integration into many control systems; elastomer professional seals option provides exceptional leak integrity and maximizes control faucet shutoff dependability; ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes. Available with traditional analog or digital I/O. Globally approved for a variety of service areas.
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| The SL7900 series mass flow instruments are the newest addition to the Brooks suite of digital thermal mass flow regulation. The advanced design and compact footprint make these devices ideal for demanding applications. New coplanar cock offers improved performance to deliver fast, accurate and reliable response across a wide and varying range of differential pressures. 1-1/8” wide body offers users an efficient, space-saving footprint. Proprietary valve control algorithm enhances response time. Ultra-high purity (UHP) and metal industrial seal options ensure clean flow paths for contamination sensitive processes. Available with analog and digital I/O. Globally approved for a variety of service areas. |
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KOFLOC 3660, 3665
The KOFLOC Standard Mass flow control MODEL 3660 SERIES is a low-cost, general-purpose gas mass flow controller. The differentiating factor of the MODEL 3660 SERIES is its numerous variants and options, a room for customization at affordable cost. It has gained wide acceptance and solid reputation for its flexibility. MODEL 3660 SERIES is now in use as a component for Sputter deposition, bond wiring, brazing and washing equipment in semiconductor industry, as well as for scientific and analytic purposes such as in thermal analysis and vacuum equipment. The MODEL 3660 and its numerous variants are also capable of meeting many unique industrial needs as the mass flow controller in industrial applications, including gas mixing, air sampling, burn control and more.
FEATURES
- Rohs compliance - SUS316 stainless steel - Unidirectional normally closed cock
- Highly reliable electro magnet actuator supplier - Compact & Low-Cost - Free mounting position
- Quick response - Low pressure-differential variant model
APPLICATIONS
- Air sampling - Professional analyzer component - Bioreactor
- Biotechnological process - Burn control - CCFL manufacturing
- Chamber pressure control - Chemical process - Environment monitoring
- Electronic device manufacturing - Food professional production - Fuel cell test
- Fermentation process - Gas applications - Industrial kiln
- Leak testing - Pharmaceutical process - Pollution monitoring
- Process flow control - R&D - Solar power element manufacturing
- Secondary calibration reference - Semiconductor process - Sputter deposition
- Surface treatment process - Thermal flame professional spray - Thin professional film manufacturing
- Vacuum apparatus - Vapor deposition |
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Our 100 Series family of mass flow regulation are one of our finest technical achievements in over 35 years in the mass flow instrumentation business. Our 100 Series is designed so the physics are correct! Our 100 Series Premium Digital family is made up of our flagship Smart-Trak® Model 100 , our highly engineered ultra-low flow solution Micro-Trak™ Model 101 and our NEMA 6 & IP67 industrial MFC, the Max-Trak™ Model 180 . Excellent accuracy and repeatability coupled with unsurpassed instrument stability result from a patented, inherently linear design, advanced platinum sensor technology, and a cock that is strong, flexible and forgiving. Our 100 Series family of instruments has raised the bar and set a higher standard in the Performance MFC marketplace.
UQNIQUE PRODUCT FEATURES
- Accuracy of +/- 1% of full scale
- Accuracy of +/- 0.7% of reading +.3% of FS
- 316 stainless steel construction
- Flow ranges from 0 to 10 sccm to 0 to 1000 slpm.
- Fast-response supplier of control valve
- True digital performance with great flexibility
- “Primary Standard” calibration& NIST traceability
- Dial-A-Gas® Technology: 10 pre-programmed gases come standard
- Small footprint makes drop-in replacement easy
- Single-sided 24 VDC power feeder
- CE approval
- MAX TRAK is Industry’s only NEMA 6/IP67 industrial MFC provides wash down protection eliminating secondary enclosures
-- MICRO-TRAK Suitable for most gases with flow rates down to 0.1 sccm (smlm)
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All CMOSens® mass flow controller (MFC) offer fast and accurate control of gas flows over a very wide range. The overall performance of a MFC depends mainly on the mass flow detector used in it. The leading performance of Sensirion MFC is based on Sensirion's unsurpassed CMOSens® sensor technology which combines a high precision sensor element with the amplification and A/D professional converter circuit on one single CMOS chip.
The digital calibrated and temperature compensated sensor signal is converted directly on the CMOSens® chip into a signal which is used in the analog or digital controlling circuit to control the cock. This results in very high accuracy, fast settling time and large dynamic range.
CMOsens® mass flow controllers are highly suitable for a variety of applications like dry etching, surface coating, gas mixing, gas analysis, and many others.
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Our 100 Series family of mass flow regulation are one of our finest technical achievements in over 35 years in the mass flow instrumentation business. Our 100 Series is designed so the physics are correct! Our 100 Series Premium Digital family is made up of our flagship Smart-Trak® Model 100 , our highly engineered ultra-low flow solution Micro-Trak™ Model 101 and our NEMA 6 & IP67 industrial MFC, the Max-Trak™ Model 180 . Excellent accuracy and repeatability coupled with unsurpassed instrument stability result from a patented, inherently linear design, advanced platinum sensor technology, and a cock that is strong, flexible and forgiving. Our 100 Series family of instruments has raised the bar and set a higher standard in the Performance MFC marketplace.
UQNIQUE PRODUCT FEATURES
- Accuracy of +/- 1% of full scale
- Accuracy of +/- 0.7% of reading +.3% of FS
- 316 stainless steel construction
- Flow ranges from 0 to 10 sccm to 0 to 1000 slpm.
- Fast-response supplier of control valve
- True digital performance with great flexibility
- “Primary Standard” calibration& NIST traceability
- Dial-A-Gas® Technology: 10 pre-programmed gases come standard
- Small footprint makes drop-in replacement easy
- Single-sided 24 VDC power feeder
- CE approval
- MAX TRAK is Industry’s only NEMA 6/IP67 industrial MFC provides wash down protection eliminating secondary enclosures
-- MICRO-TRAK Suitable for most gases with flow rates down to 0.1 sccm (smlm)
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All CMOSens® mass flow controller (MFC) offer fast and accurate control of gas flows over a very wide range. The overall performance of a MFC depends mainly on the mass flow detection used in it. The leading performance of Sensirion MFC is based on Sensirion's unsurpassed CMOSens® sensor technology which combines a high precision sensor element with the amplification and A/D industrial converter circuit on one single CMOS chip.
The digital calibrated and temperature compensated sensor signal is converted directly on the CMOSens® chip into a signal which is used in the analog or digital controlling circuit to control the cock. This results in very high accuracy, fast settling time and large dynamic range.
CMOsens® mass flow controllers are highly suitable for a variety of applications like dry etching, surface coating, gas mixing, gas analysis, and many others.
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Max-Trak is a rugged and reliable technical gas mass flow control ideal for many process driver environments. Max-Trak outperforms the competition as it conforms to the more rigorous requirements of NEMA 6 and IP67. In addition, Max-Trak controls gas mass flow rate from 10 to 1000 slpm, with lower flows (to 2 slpm full scale) available upon request.
Excellent accuracy and repeatability coupled with unsurpassed instrument stability result from a patented, inherently linear design, advanced platinum sensor technology, and a cock that is strong, flexible and forgiving. The 0-300 slpm version also features the only fully enclosed valve design to drastically minimize leak-in paths for MAXIMUM protection!
UNIQUE PRODUCT FEATURES
-Industry’s only NEMA 6/IP67 industrial MFC provides wash down protection eliminating secondary enclosures
- Measure & control gas mass flow rates up to 1000 slpm - Sierra offers other models up to 100,000 slpm & higher (meters only)
- Fully enclosed valve design (except for high flow unit)
- Accuracy: ±1% of Full Scale
- Repeatability: ±0.2% Full Scale ensures a stable process even under changing conditions
- Dial-A-Gas lets you select from up to 10 gases in one instrument, creating great flexibility and reducing spares inventories
- Both digital and analog communication included
- All stainless steel construction is suitable for any clean gas, even corrosives & toxics
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KOFLOC FLOW COMPO™
The KOFLOC Portable Mass Flow Professional control unit FLOW COMPO is a light, compact measurement & control unit that combines the KOFLOC Compact Readout Unit MODEL CR-300 and a mass flow control or a mass flow meter in one convenient package.
FEATURES
♦ Light & compact unit
♦ FS scaling, flow setting, cock open/close buttons
♦ Selection of connections and wetted parts
♦ Contact Kofloc for more information on metal professional seals for corrosive gases |
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