Mass flow regulators

32 companies | 118 products
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proportional flow controller
proportional flow controller
MQV series

Flow rate: 0 l/min - 100 l/min
Pressure: 5,000 Pa - 400,000 Pa

... high-performance digital mass flow controllers that incorporate a thermal mass flow sensor developed by Azbil Corporation, the micro thermal flow sensor in addition to a proportional ...

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Azbil
mass flow controller
mass flow controller
EL-FLOW

Flow rate: 0 l/min - 25 l/min
Pressure: 10 bar

... thermal mass flow sensor, a precise control valve and a microprocessor based PC board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller ...

thermal mass flow controller
thermal mass flow controller
F4Q

Flow rate: 0.002 l/min - 500 l/min
Pressure: 1 bar - 3 bar

... wide range of flow rates. High-accuracy control is possible for both high and low flow rates. This is great for applications where the flow rate set point changes significantly. • High-speed ...

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Azbil Europe NV
mass flow controller
mass flow controller
F4H

Flow rate: 0.05 l/min - 20 l/min
Pressure: 20,000 Pa - 300,000 Pa

... everything. The Model F4H Mass Flow Controller was specifically engineered for this challenge. While conventional controllers are overwhelmed by plasma-generated electrical interference, the F4H maintains a steady inert ...

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Azbil Europe NV
panel-mount flow controller
panel-mount flow controller
MPC

Flow rate: 0 l/min - 20 l/min
Pressure: 0 Pa - 500,000 Pa

... built-in miniature proportioning valve, enabling full-automated flow control * - Azbil's original mass flow sensor High speed (1 sec.), high accuracy (2% FS) flow ...

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Azbil Europe NV
thermal mass flow controller
thermal mass flow controller
SEC-Z500X series

... is the changes can be made without removing the mass flow controller from the gas panel or piping. This reduces the number of spare mass flow controllers required; saving both time and ...

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HORIBA STEC
proportional flow controller
proportional flow controller
8741

Flow rate: 0.01 l/min - 160 l/min
Pressure: 10 bar
Nominal diameter: 50 µm - 8,000 µm

... applications with many control loops. Up to 32 MFCs/MFMs can be connected to one fieldbus gateway. Type ME43 transmits the internal CANopen-based communication to Industrial Ethernet and fieldbus standards. The mass flow ...

diaphragm flow controller
diaphragm flow controller
VCD 1000

Pressure: 250, 50 psi

... VCD 1000 flow controller is precision-engineered to control low gas flows at constant mass flow rates regardless of changes in downstream pressure. The ...

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Parker Precision fluidics Division
thermal mass flow controller
thermal mass flow controller
​HFM-D-300A

Flow rate: 0 l/min - 25 l/min
Pressure: 500 psi

... Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements. HFM-D-300A / HFC-D-302A mass flow instruments have flow ranges from 0-5 ...

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Teledyne Hastings Instruments
thermal mass flow controller
thermal mass flow controller
HFM-D-301A

Flow rate: 0 l/min - 3,000 l/min
Pressure: 500 psi

... Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements. HFM-D-301A/HFC-D-303A mass flow instruments have flow ranges from 0-25 slm ...

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Teledyne Hastings Instruments
thermal mass flow controller
thermal mass flow controller
HFM-D-305A

Flow rate: 0 l/min - 2,500 l/min
Pressure: 500 psi

... Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements. HFM-D-305A/HFC-D-307A mass flow instruments have flow ranges from 0-1000 ...

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Teledyne Hastings Instruments
proportional flow controller
proportional flow controller
TLFC

Flow rate: 50 l/min
Pressure: 0 psi - 500 psi

... The NEW- FLOW Thermomal Mass Flow Meters provide high performance. Thermal Technology offers advantages in accuracy, sensitivity and turn quality components and the latest technology are combined to provide ...

thermal mass flow controller
thermal mass flow controller
TMFC

Flow rate: 200 l/min
Pressure: 0 psi - 500 psi
Nominal diameter: 1 in

... ±1% Accuracy Linear Output Thermal Technology For Using in Non Corrosive Gas For Flow Rates up to 200 SLM Power Supply Included The NEW- FLOW Thermomal Mass Flow Meters provide high performance. ...

proportional flow controller
proportional flow controller
ULFC

Flow rate: 50 l/min
Pressure: 0 psi - 500 psi
Nominal diameter: 0.25 in

... linear 0-5VDC and 4-20mA output. The ULFC Series measures the mass flow rate of gases in 18 ranges from 0-10 SCCM to 0-50 SLM as shown in the range table. The ULFC Series combines a mass flow ...

thermal mass flow controller
thermal mass flow controller
FLEXI-FLOW™

Flow rate: 0.005 l/min - 500 l/min
Pressure: max 16.0 bar

... processes. Read the application stories: Gas flow control for benchtop bioreactors with flexible gas flow controller Stable gas flow control for ...

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Bronkhorst
thermal mass flow controller
thermal mass flow controller
EL-FLOW® Base

Flow rate: 0 l/min - 200 l/min
Pressure: 0 bar - 10 bar

... The Mass Flow Controllers of the EL- FLOW® Base series are standard and straightforward instruments. They provide accurate measurement, fast response and stable control in common gas flow ...

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Bronkhorst
thermal mass flow controller
thermal mass flow controller
LIQUI-FLOW™

Pressure: 100 bar

... LIQUI- FLOW™ series L10I/L20I digital Liquid Flow Meters / Controllers for low flow ranges are equipped with a rugged 'industrial style' (IP65) pc-board housing for use in industrial environments. The ...

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Bronkhorst
proportional flow regulator
proportional flow regulator
B3 series

Flow rate: 28 l/min - 850 l/min
Pressure: 8, 30 bar

... Proportional Pressure Regulator and KMF1000 gas mass flow meter. This series uses a rapid analog PID to regulate the opening of the proportional valve in order to change the flow rate. ...

mass flow controller
mass flow controller
MFC2000

Flow rate: 0 l/min - 200 l/min
Pressure: 0.1 MPa - 0.8 MPa

... designed for general purpose mass flow control application with clean and dry gases. It utilizes the company's Thermal-D sensing chip and can be applied for non-corrosive gases with known diffusivities. MFC2000 series ...

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SIARGO
mass flow controller
mass flow controller
MFC4000

... MFC4000 series are designed for applications where high purity flow process is mandate. The sensing chip is conformingly coated with SEMI-grade anti-corrosion films. Other package materials are also strictly selected to the highest industry ...

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SIARGO
mass flow controller
mass flow controller

The company also offers original development manufacture for trusted customers. The products can be tailored with a variety of data interfaces, multiparameter sensing and gas mixture concentration monitoring and other customized features. Click on the ...

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SIARGO
thermal mass flow controller
thermal mass flow controller
flox[on] B series

Flow rate: 1 l/min - 250 l/min
Pressure: 16 bar

... the new flox[on] B that represents a new generation of mass flow controller developed by FC Technik. It is based on the proved and well tested technique of thermal mass flow controller and a gas flow ...

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FCTechnik - Gas Control Systems - flox[on] MFC
thermal mass flow controller
thermal mass flow controller
flox[on] S series

Flow rate: 1 l/min - 1,200 l/min
Pressure: 16, 70 bar

... the new flox[on] S that represents a new generation of mass flow controller developed by FC Technik. It is based on the proved and well tested technique of thermal mass flow controller and a gas flow ...

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FCTechnik - Gas Control Systems - flox[on] MFC
thermal mass flow controller
thermal mass flow controller
flox[on] J

Flow rate: 30 l/min - 5,000 l/min
Pressure: 16 bar

... The measurement of the flox[on] J mass flow controller for hugh gas flow is temperature and pressure compensated with a very high control accuracy in the lower and upper flow ranges. ...

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FCTechnik - Gas Control Systems - flox[on] MFC
mass flow regulator
mass flow regulator
MV-302

Flow rate: 0.02 l/min - 2 l/min
Pressure: 0 bar - 10 bar

... value) - desired flow units - type of gas - totalised flow Bright, wide-angle OLED display Free of parallax error Virtually independent of temperature and pressure variations Low pressure drop Wide flow ...

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Mass Flow ONLINE BV
mass flow controller
mass flow controller
DVT

Flow rate: 40, 60 l/min
Pressure: 400, 350 Pa

... We are pleased to inform you that the range of Solenoid control diverter flow has been enriched with the new 12V versions and the 315 bar max pressure one. ...

proportional flow controller
proportional flow controller
MFCB

Flow rate: 200, 100 l/min
Pressure: 101,000 Pa - 1,000,000 Pa

... Valve type : Proportional solenoid valve normally closed when power off (N.C.), 65K Full color TFT-LCD display, 4 Directions display for easy setup and viewing. • 65K Full color TFT-LCD display. • 4 Directions display for easy setup and viewing. • ...

thermal mass flow controller
thermal mass flow controller
SLA58 series

Flow rate: 0 l/min - 2,500 l/min
Pressure: 310, 70, 103 bar

... get with the SLA5800 Series mass flow controllers and meters. The SLA5800 Series features the high accuracy, high zero stability and high repeatability you expect from the industry leader in mass flow ...

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Brooks Instrument
proportional flow controller
proportional flow controller
GFCS-01 series

Flow rate: 0 l/min - 1,000 l/min
Pressure: 5 psi - 1,000 psi
Nominal diameter: 0.1 in - 0.8 in

... gases are divided into two laminar flow paths, one through the primary flow conduit, and the other through a capillary sensor tube. Both flow conduits are designed to ensure laminar flows ...

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Aalborg Instruments
thermal mass flow controller
thermal mass flow controller
GE50A

Flow rate: 0 l/h - 3,000 l/h
Pressure: 150 psi

... digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and ...

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MKS Instruments
mass flow controller
mass flow controller
SFM6000D

Flow rate: 5 l/min
Pressure: 10 bar

... SFM6000 is a valve-less sister variant of the SFC6000 mass flow controller, offering a great performance at an even lower price. The SFC6000 mass flow controller is Sensirion’s next generation mass ...

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Sensirion
thermal mass flow controller
thermal mass flow controller
GSC series

Pressure: 0 bar - 11 bar
Nominal diameter: 0.25, 0.5 in

... technology and industry standard interfaces make the red-y smart series thermal mass flow meters (MFM) and mass flow controllers (MFC) particularly suitable for measurement and control ...

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Vögtlin Instruments GmbH – Gas Flow Technology
thermal mass flow controller
thermal mass flow controller
Compod™ Upgrade

... functionality, faults and system upsets User programmable control module Daisy-chain multiple devices Make your own mini process control system Overview Many customers supercharge their SmartTrak mass ...

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Sierra Instruments
thermal mass flow controller
thermal mass flow controller
MF1100B

Flow rate: 0 l/h - 1,200 l/h

... THE MODEL MF1100B MASS FLOW CONTROLLER FEATURES EXTENDED CAPABILITY OF RANGES UP TO 20 SLM, HIGHER TERMPERATURE STABILITY AND MANY FUNCTIONS. Features ■MINIMUN RANGE OF 5 SCCM & UP TO 20 SLM ■COMPACT SIZE ■STANDARD SOFT-START FUNCTION ■MINIMUM ...

thermal mass flow controller
thermal mass flow controller
M3030VA

Pressure: 90 bar

... range of Thermal Mass Flowmeter and controllers. They are available from flow rate of 10 mls/min to over 5000 ls/min. in analog and digital versions. Applications : R&D, Pilot Plants, CVD, Gas mixing, ...

mass flow controller
mass flow controller
MCD

Pressure: 145 psi

... MCD–Bidirectional Gas Mass Flow Controllers The most versatile gas flow controller in the world Alicat’s MCD is the world’s first bidirectional mass flow controller. ...

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Alicat Scientific
differential pressure flow regulator
differential pressure flow regulator
deltafit DT25

Pressure: 0 bar - 10 bar
Nominal diameter: 65 mm - 500 mm

... ready-to-go-setup components are ready mounted and do not need any startup efforts after installation! Economic air mass flow regulation deltafit saves your money in the whole investment period. low acquisition ...

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