Koyo Thermos Systems
Group: Koyo Seiko
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Vacuum furnace
max. 700 °C | VFS-4000 Koyo Thermos Systems

  • vacuum furnace max. 700 °C | VFS-4000 Koyo Thermos Systems
Available for vacuum/atmospheric pressure process
Available for various gases
Substrate size: 730×930 mm (Typical)
(To be discussed for other size.)
Excellent temp performance of large LGO heater



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