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Pneumatic valve 075 seriesisolationnickel-platedaluminum
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Characteristics
- Operation
- pneumatic
- Function
- isolation
- Body
- nickel-plated, aluminum
- Applications
- for the semiconductor industry
- Associated function
- transfer
- DN
46 mm, 50 mm, 236 mm, 336 mm
(1.811 in, 1.969 in, 9.291 in, 13.228 in)- Pressure
Min.: 4 bar
(58 psi)Max.: 7 bar
(101.5 psi)
Description
Transfer door for load lock chambers. For applications under atmospheric pressure.
Actuator
Actuator cover kit to cover the pistons and cylinders of the gate pressure bar
Door
Other sealing materials, e.g. FFKM, VMQ, FVMO gate seal
O-ring seal in gate instead of the vulcanized seal (standard)
Gate hard anodized or nickel-plated
Catalogs
Other VAT Vakuumventile AG products
Transfer valves and doors for SEMI
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.