High performance and high range ability Gas Flow Meters.
The CMS series of gas mass flow meters employs our proprietary thermal flow rate sensor as the sensing element. Through integration of this ultraminiature mass flow sensor, which is manufactured using micromachining technology and advanced ultrafine channel design, an unprecedented level of high accuracy and wide measurement range have been achieved at low cost.
Boasting both ease of use and high reliability, these flowmeters will set the standard for the future.
Manufactured by silicon micro-machining and thin-film technologies, this thermal type flow sensor is a mere 1,7 mm² and 0,5 mm thick.
The use of ultra-precision machining technology minimizes variations in element layout and thermal capacity. High resolution of 1 mm/s in flow speed and high-speed response of approximately 2 ms are achieved at the sensor chip level.
When gas flow does not exist, the temperature distribution around the heater is symmetric. When the gas starts to flow from Ru to Rd, the temperature at Ru upstream begins to decrease, while the temperature at Rd downstream increases, thus causing a distortion in the symmetry in temperature distribution.
This temperature difference between Ru and Rd is used to calculate the mass velocity (velocity x density).