CIQTEK FESEM Microscope SEM5000Pro Specifications
•Electron Optics
Resolution:0.8 nm @ 15 kV, SE/1.2 nm @ 1.0 kV, SE
Acceleration Voltage:0.02kV ~ 30 kV
Magnificationn (Polaroid):1 ~ 2,500,000 x
Electron Gun Type:Schottky Field Emission Electron Gun
•Specimen Chamber
Camera:Dual Cameras (Optical navigation + chamber monitor)
Stage Range:X: 110 mm, Y: 110 mm, Z: 50 mm/T: -10°~ +70°, R: 360°
•SEM Detectors and Extensions
Standard:Inlens Electron Detector/Everhart-Thornley Detector (ETD)
Optional:Retractable Backscattered Electron Detector (BSED)
Retractable Scanning Transmission Electron Microscope(STEM)
Low Vacuum Detector(LVD)
Energy Dispersive Spectroscopy (EDS / EDX)
Electron Backscatter Diffraction Pattern (EBSD)
Specimen Exchange Loadlock (4 inch /8 inch)
Trackball & Knob Control Panel
•Software
Language:English
Operating System:Windows
Navigation:Optical Navigation, Gesture Quick Navigation, Trackball (optional)
Automatic Functions:Auto Brightness & Contrast, Auto Focus, Auto Stigmator
The CIQTEK SEM5000Pro is a Schottky field emission scanning electron microscope (FE-SEM) specialized at high resolution even under low excitation voltage. Employing an advanced "Super-Tunnel" electron optics technology facilitates a crossover-free beam path together with an electrostatic-electromagnetic compound lens design.
These advancements reduce spatial charging effect, minimize lens aberrations, enhance imaging resolution at low voltage, and achieve a resolution of 1.2 nm at 1 kV.