FE-SEM microscope SEM5000X

laboratoryfor quality controlfor materials analysis

CIQTEK SEM5000X FESEM Microscope Specifications Electron Optics Resolution: 0.6 nm @ 15 kV, SE 1.0 nm @ 1 kV, SE Acceleration Voltage: 0.02kV ~30 kV Magnification: 1 ~ 2,500,000 x Electron Gun Type: Schottky Field Emission Electron Gun Specimen Chamber Cameras: Dual Cameras (optical navigation + chamber monitor) Stage Type: 5-Axis Mechanical Eucentric Specimen Stage Stage Range: X=110 mm, Y=110 mm, Z=65 mm T: -10*~+70°, R: 360° SEM Detectors and Extensions Standard: In-lens Detector Everhart-Thornley Detector (ETD) Optional： - Retractable Back-Scattered Electron Detector (BSED) Retractable Scanning Transmission Electron Microscopy Detector (STEM) Low Vacuum Detector (LVD) Energy Dispersive Spectrometer (EDS / EDX) Electron Backscatter Diffraction Pattern (EBSD) Specimen Exchange Loadlock (4 inch / 8 inch) Trackball & Knob Control Panel Duo-Dec mode (Duo-Dec) The CIQTEK SEM5000X is an ultra-high resolution FESEM with optimized electron optics column design, reducing overall aberrations by 30%, achieving ultra-high resolution of 0.6 nm@15 kV and 1.0 nm@1 kV. Its high resolution and stability make it advantageous in advanced nano-structural materials research, as well as the development and manufacturing of high-technology node semiconductor IC chips. # Breakthrough Resolving Power # Mechanical Eucentric Specimen Stage # *Dual Beam Deceleration Mode (Duo-Dec) # *Specimen Exchange Loadlock (8 inches compatible) # High Stability # Excellent Expandability