Focused ion beam scanning electron microscope DB550

for analysisinspectionfor research

CIQTEK FIB-SEM DB550 Specifications *Electron Optics - Electron Gun Type: High Brightness Schottky Field Emission Electron Gun Resolution: 0.9 nm@15 kV; 1.6 nm@1 kV Acceleration Voltage: 0.02 kV to 30 kV *Ion Beam System - Ion Source Type: Gallium Resolution: 3 nm@30 kV Acceleration Voltage: 0.5 kV to 30 kV *Specimen Chamber - Vacuum System: Fully Automatic Control, Oil-free Vacuum System Cameras: Three Cameras(Optical navigation x1 + chamber monitor x2) Stage Type: Motorized 5-axis Mechanical Eucentric Specimen Stage Stage Range: X=110 mm, Y=110 mm, Z=65 mm T: -10°~+70°, R:360° *SEM Detectors and Extensions - Standard: - In-lens Electron Detector Everhart-Thornley Detector (ETD) Optional: - Retractable Back-Scattered Electron Detector (BSED) Retractable Scanning Transmission Electron Microscopy Detector (STEM) Energy Dispersive Spectrometer (EDS/EDX) Electron Backscatter Diffraction Pattern (EBSD) Nano-manipulator Gas Injection System Plasma Cleaner Specimen Exchange Loadlock Trackball & Knob Control Panel The CIQTEK DB550 Focused Ion Beam Scanning Electron Microscope (FIB-SEM) has a focused ion beam column for nano-analysis and specimen preparation. It utilizes “super tunnel” electron optics technology, low aberration, and non-magnetic objective design. # "SuperTunnel" Electron Optics Technology # Gallium Ion Beam # Excellent Expandability # Integrated Gas Injection System # Integrated Nano-manipulator # Specimen Exchange Loadlock (8 inches compatible)