Gas pressure regulator and reducer JR1000

diaphragmsingle-stagestainless steel 316L

Overview
The JR1000 Series is a single-stage ultra-high purity (UHP) pressure reducing regulator designed for low-to-intermediate flow gas delivery in semiconductor and other high-purity industrial applications. Constructed from SS 316L materials with metal-to-metal diaphragm sealing, the regulator minimizes internal dead volume while supporting inlet pressures up to 3500 psig.

Features

• Body material: SS 316L, SS 316L VAR.
• Metal-to-metal diaphragm sealing for UHP compatibility.
• Internal electrolytic polishing with surface smoothness up to Ra 5 μin.
• Reduced internal dead volume to limit contamination and purge time.
• Maximum inlet pressure: up to 3500 psig.
• Flow coefficient (Cv) options: 0.09 and 0.15.
• Maximum flow rate: Standard 30 SLPM; High Flow (HF) 120 SLPM.
• High-clean assembly and packaging suitable for semiconductor/high-purity environments.
• All units undergo helium leak testing prior to shipment.

Technical Data
Performance flow curves, dimensional drawings and technical charts are available for sizing and selection (refer to the product images and datasheet on the product page).

Product Size
Dimensions shown in millimeters are for reference only and may be updated without notice. Confirm current drawings for installation and interface requirements.

Specifications

• Series: JR1000
• Type: Single-stage pressure reducing regulator
• Flow range: Low to intermediate
• Body material: SS 316L, SS 316L VAR
• Diaphragm sealing: Metal-to-metal
• Internal finish: Electrolytic polishing (surface smoothness up to Ra 5 μin)
• Internal volume: Small (reduced internal dead volume)
• Maximum inlet pressure: Up to 3500 psig
• Flow coefficient (Cv): 0.09 and 0.15
• Maximum flow rate: Standard 30 SLPM; High Flow (HF) 120 SLPM
• Cleanliness: High-clean assembly and packaging for semiconductor/high-purity applications
• Quality control: Helium leak testing performed on every unit