Gas pressure regulator DPR1

diaphragmtwo-stagemetal

Introduction
The DPR1 series is a compact, two-stage high-purity cylinder pressure regulator designed for low-flow delivery of toxic, flammable and pyrophoric gases in semiconductor and advanced industrial processes. Tied, convoluted metal diaphragms and a metal-to-metal diaphragm-to-body seal preserve gas integrity and minimize diffusion.

Features

• Maximum inlet pressure: 3000 psig / 207 bar
• Outlet pressure ranges: 0–25 psig, 0–50 psig, 0–100 psig, 0–150 psig (0–1.7 bar, 0–3.4 bar, 0–6.9 bar, 0–10.3 bar)
• Design proof pressure: 150% of maximum rated
• Leakage: internal — bubble-tight; external — designed to meet < 2 x 10-8 atm cc/sec He
• Operating temperature: -40°F to 140°F / -40°C to 60°C
• Flow capacity: Cv = 0.05
• Maximum operating torque: 30 in‑lb / 3.4 N·m
• Decaying inlet characteristic: 0.06 change / 100 psig (0.004 change / 6.9 bar)

Advantages

• Tied, convoluted diaphragms for improved sensitivity and control accuracy
• Metal-to-metal diaphragm-to-body seal to minimize diffusion
• Positive seal design with captured bonnet ports to enhance integrity
• Diaphragm-to-valve linkage improves seat sealing reliability
• Stable outlet under varying inlet pressures (low decaying characteristic)

More Options

• Optional outlet ranges: 0–25 psi, 0–50 psi, 0–100 psi, 0–150 psi

Technical specifications

• Model / Series: DPR1 series
• Maximum inlet pressure: 3000 psig / 207 bar
• Outlet pressure ranges: 0–25 psig (0–1.7 bar), 0–50 psig (0–3.4 bar), 0–100 psig (0–6.9 bar), 0–150 psig (0–10.3 bar)
• Design proof pressure: 150% of maximum rated pressure
• Leakage: internal — bubble-tight; external — designed to meet < 2 x 10-8 atm cc/sec He
• Operating temperature range: -40°F to 140°F / -40°C to 60°C
• Flow capacity (Cv): 0.05
• Maximum operating torque: 30 in‑lb / 3.4 N·m
• Decaying inlet characteristic: 0.06 change / 100 psig (0.004 change / 6.9 bar)