Heated gas pressure regulator JR1000

for chemical productsdiaphragmsingle-stage

Product Overview
Ultra High Purity (UHP) gas valve and regulator solutions designed for semiconductor fabs and advanced photovoltaic gas distribution lines. Engineered for continuous cleanroom operation and six-nines purity gas streams.

Core Overview
UHP gas valves and regulators are integral to semiconductor manufacturing and PV cell production. Precision-manufactured components from established Chinese suppliers meet international standards for material cleanliness, leak integrity and low particle generation.

Technical Specifications and Material Science

• Premium metallurgy: forged double-melted 316L VIM VAR stainless steel to minimize inclusions and maximize chemical resistance.
• Surface topology: internal wetted paths electropolished to Ra < 5 μin to reduce particle entrapment and enable effective purging.
• Hermetic sealing: metal-to-metal diaphragm seals with helium leak integrity < 1×10-9 atm·cc/s.

Strategic Market Benefits

• Yield protection: full isolation of toxic, corrosive and pyrophoric gases (e.g., silane, ammonia) during deposition and etch processes.
• System integration: standard VCR face-seal connections for compatibility with valve manifold boxes (VMBs), gas cabinets and automation.
• Procurement efficiency: direct sourcing options for cost optimization while supplying cleanroom-certified hardware suitable for 24/7 operation.

Product Family — JR1000 Series
JR1000 Series — single-stage pressure regulator for low to intermediate flow applications.

Features

• Body material: SS 316L; 316L VIM VAR option available.
• Metal-to-metal diaphragm sealing.
• Internal electropolish finish achieving Ra < 5 μin.
• Low internal volume to minimize gas retention.
• Maximum inlet pressure up to 3500 psig.
• Flow coefficient options: Cv 0.09 and Cv 0.15.
• Flow capacities: standard 30 SLPM; High Flow (HF) option 120 SLPM.
• Cleanroom assembly and packaging; each unit helium leak tested prior to shipment.

Technical Data Highlights
Available technical drawings, dimensional diagrams and flow curves detail mechanical layout, performance and ordering matrix for the JR1000 family. Dimensions provided in millimeters; refer to product datasheet for full specifications.

Technical Data / Specifications

• Series: JR1000 Series (single-stage pressure regulator).
• Body material: 316L stainless steel; 316L VIM VAR option.
• Wetted surface finish: electropolished, Ra < 5 μin.
• Sealing: metal-to-metal diaphragm; helium leak integrity < 1×10-9 atm·cc/s.
• Inlet pressure rating: up to 3500 psig.
• Flow coefficients: Cv = 0.09 and 0.15.
• Flow capacities: standard 30 SLPM; HF option 120 SLPM.
• Connections: standard VCR face-seal for VMB and gas cabinet integration.
• Applications: semiconductor fabs, advanced photovoltaic production, laboratories and high-purity gas distribution systems.
• Testing: helium leak testing on each unit; cleanroom assembly and packaging.