Gas pressure regulator JR1000

diaphragmsingle-stagestainless steel 316L

Gas Pressure Reducing Valve JR1000 Series (Single-Stage) 316L VIM VAR Stainless Steel — Electropolished, Metal-to-Metal Diaphragm

Product Overview and Purpose
The Jewellok JR1000 Series single-stage gas pressure reducing valve is engineered to reduce high cylinder pressures to controlled operating levels for aggressive, toxic and corrosive specialty gases used in semiconductor and photovoltaic manufacturing (examples: HCl, Cl2, NH3). The regulator is specified for ultra-high-purity applications where hermetic sealing, low internal volume and resistance to chemical attack are critical.

Core Technical Features

• VIM VAR Metallurgy: Forged from double-melted SS 316L VAR (VIM VAR) to minimize inclusions and increase resistance to chemical corrosion and hydrogen embrittlement.
• Electropolished Wetted Paths: Internal surfaces electropolished to typically <5 μin Ra to reduce moisture retention and outgassing.
• Tied Metal Diaphragm: Mechanically linked diaphragm and poppet for positive shutoff in presence of salts or particles to prevent downstream over-pressurization.
• Hermetic Metal-to-Metal Seals: Body sealing maintains helium leak integrity < 1×10-9 atm·cc/s to protect the process stream from moisture and oxygen ingress.

Installation and Operational Guidelines
Unpack and handle the regulator inside a certified cleanroom. Install using standard integrated VCR face-seal connections with new metal gaskets. Perform a full nitrogen purge before introducing corrosive or toxic media and verify leak integrity with appropriate test gas. Follow a scheduled inspection and maintenance plan to monitor pressure stability and extend service life.

JR1000 Series
Single-stage regulator designed for low to intermediate flow applications where chemical compatibility and cleanability are required.

Features

• Body material: SS 316L or SS 316L VAR (VIM VAR double-melted)
• Metal-to-metal tied diaphragm sealing
• Electropolished wetted surfaces, typical Ra < 5 μin
• Minimized internal volume for rapid purging
• Maximum inlet pressure: up to 3500 psig
• Flow coefficient (Cv): 0.09 and 0.15
• Maximum flow rate (std): 30 SLPM; high-flow (HF): 120 SLPM
• High-cleanliness assembly and cleanroom packaging
• Individual helium leak test before shipment
• Standard integrated VCR face-seal connections (use new metal gaskets)

Technical Data
Hermetic metal-to-metal sealing achieving helium leak rates < 1×10-9 atm·cc/s; electropolished wetted surfaces <5 μin Ra; Cv options and published flow curves for sizing. Refer to provided dimensional drawings and flow curves for installation and selection.

Technical Specifications

• Model / series: JR1000 Series (single-stage)
• Body material: SS 316L or SS 316L VAR (VIM VAR, double-melted)
• Diaphragm sealing: metal-to-metal tied diaphragm
• Surface finish (wetted paths): electropolished, typical Ra < 5 μin
• Hermetic leak integrity: < 1×10-9 atm·cc/s (helium)
• Maximum inlet pressure: up to 3500 psig
• Flow coefficient (Cv): 0.09 and 0.15
• Maximum flow rate: standard 30 SLPM; high-flow 120 SLPM
• Internal volume: minimized for rapid purging
• Intended media: aggressive, toxic and corrosive specialty gases (e.g., HCl, Cl2, NH3)
• Testing: helium leak tested; high-cleanliness assembly and cleanroom packaging
• Connections: standard integrated VCR face-seal connections (use new metal gaskets)