Gas pressure regulator JR1300

diaphragmsingle-stagestainless steel 316L

Ultra High Purity Gas Valve JR1300 Series Single-Stage Regulator — Cleanroom Certified for Advanced Photovoltaic Lines

Core Overview
Procuring cleanroom-certified ultra high purity gas valve equipment is essential for advanced photovoltaic manufacturing lines (TOPCon, HJT). These valves support chemical vapor deposition (CVD) and specialty gas distribution by ensuring fluid paths remain free of particulates, moisture and hydrocarbons from installation onward.

Key Technical Advantages

• Contamination prevention: Cleanroom assembly with deionized water cleaning, ultra-pure nitrogen drying and double-bagged packaging removes particulates, ambient moisture and hydrocarbons prior to installation.
• Advanced metallurgy: Body forged from double vacuum-melted stainless steel (SS316L / SS316L VAR) to minimize outgassing and resist aggressive process chemistries such as ammonia and silane.
• Zero dead volume: Optimized internal geometry prevents trapped gas pockets, enabling fast purge cycles and reliable process transitions.
• Hermetic sealing: Metal-to-metal diaphragm sealing with helium leak rates below 1×10-9 atm cc/sec provides an airtight barrier against oxygen infiltration.

Strategic Impact on Production
Using certified ultra high purity hardware reduces unplanned line interventions, preserves minority carrier lifetimes in cells, and supports continuous 24/7 operation to maximize module output and lower total cost of ownership.

JR1300 Series Single Stage Regulator
Suitable for low to intermediate flow applications.

Features

• Body material: SS 316L, SS 316L VAR.
• Metal-to-metal diaphragm sealing.
• Internal electrolytic polishing with surface finish up to Ra 5 μin.
• Small internal volume optimized for rapid purging.
• Maximum inlet pressure: 600 psig.
• Flow coefficient (Cv): 1.1.
• Maximum flow rate: 1000 SLPM.
• High-cleanliness assembly and packaging; every unit undergoes helium leak testing prior to shipment.

Technical Data
Product drawings, dimensional references, flow curves and ordering tables are provided for the JR1300 Series (dimensions in millimeters for reference only).

Technical specifications

• Assembly: Cleanroom assembly, deionized water cleaning, ultra-pure nitrogen drying, double-bagged packaging.
• Material: Double vacuum-melted stainless steel; available in SS316L and SS316L VAR variants.
• Sealing: Metal-to-metal diaphragm (hermetic).
• Helium leak rate: < 1×10-9 atm cc/sec.
• Internal finish: Electrolytic polishing up to Ra 5 μin on wetted surfaces.
• Internal volume: Optimized for zero/very low dead volume to allow rapid purging.
• Maximum inlet pressure: 600 psig.
• Flow coefficient (Cv): 1.1.
• Maximum flow rate: 1000 SLPM.
• Intended application: Chemical vapor deposition & specialty gas distribution for advanced photovoltaic (TOPCon, HJT) manufacturing lines.
• Testing: Each unit is helium leak-tested prior to shipment.