Diaphragm valve LD

pneumaticmanualisolation

Product Overview
The Jewellok LD SERIES 316L VIM‑VAR stainless steel ultra‑high‑purity diaphragm valve provides fluid isolation for semiconductor gas distribution systems. Engineered for cleanroom use, it controls specialty, hazardous and corrosive gases in valve manifold boxes, gas cabinets and point‑of‑use connections where contamination must be eliminated.

Core Technical Engineering

• VIM VAR Metallurgy: Double vacuum melted 316L stainless steel forged to reduce non‑metallic inclusions, increasing corrosion resistance and minimizing hydrogen embrittlement risk.
• Electropolished Wetted Paths: Internal flow channels electropolished to an ultra‑smooth finish (< 5 μin Ra) to limit particle entrapment and enable fast purging.
• Hermetic Diaphragm Sealing: Metal‑to‑metal diaphragm sealing using high‑endurance alloys to avoid soft elastomers; helium mass spectrometer leak rate < 1×10-9 atm·cc/s.
• Zero Dead Volume: Optimized internal geometry to prevent virtual leaks and fluid stagnation, protecting sub‑micron wafer processes from trace contaminants.

Installation and Safety Protocols
Valves are double‑bagged for cleanroom handling. Install only in certified clean environments. Orient body per flow arrow and use integrated VCR face‑seal fittings with metal gaskets. Conduct helium leak testing and a nitrogen purge before introducing toxic or pyrophoric gases. Schedule regular inspections to verify pneumatic or manual actuation performance.

LD SERIES — Low Pressure Manual Diaphragm Valve
Features

• Body: 316L VIM‑VAR stainless steel suitable for ultra‑high‑purity use; wetted surface roughness < 5 μin Ra; internal design minimizes entrapment and maximizes purge and flow capacity.

Diaphragm

• Hastelloy C‑22 or cobalt‑based superalloys (UNS R30003) selected for high strength and corrosion resistance, optimized for extended cycle life.

Seat

• Fully contained PCTFE seat resists swelling and contamination, reduces particle generation and improves helium leak performance; assembled and packaged under strict cleanliness procedures.
• Every unit undergoes helium leak testing prior to shipment.

Technical Data
Reference drawings and flow‑channel diagrams provided (dimensions in millimeters; subject to change).

Flow Channel Form
Flow channel geometry optimized to minimize dead volume and improve purge efficiency.

Ordering Information
Standard ordering specifications and model configurations available; refer to product ordering tables or documentation for options.

Technical specifications

• Brand: Jewellok
• Series / Model: LD SERIES
• Body material: 316L VIM‑VAR stainless steel (double vacuum melted)
• Wetted path finish: Electropolished, surface roughness under 5 micro inches Ra
• Diaphragm materials: Hastelloy C‑22 or cobalt‑based superalloys (UNS R30003)
• Seat material: Fully contained PCTFE
• Sealing: Metal‑to‑metal hermetic diaphragm (no soft elastomers)
• Helium leak rate: < 1×10-9 atm·cc/s (helium mass spectrometer test)
• Design: Zero dead volume, optimized internal architecture to prevent virtual leaks
• Packaging: Double‑bagged for cleanroom handling
• Applications: Semiconductor gas distribution systems, valve manifold boxes, gas cabinets, point‑of‑use tool hookups