Diaphragm valve HD

pneumaticflow controlisolation

Pneumatic Diaphragm Valve HD Series — 316L Stainless Steel, High-Purity, High-Pressure for Laboratory Specialty Gases

Product Application and Purpose
The HD Series pneumatic diaphragm valve provides automated flow control and isolation in high-purity laboratory gas systems. Designed for semiconductor, analytical and research environments, it manages high-pressure specialty gases (flammable, toxic, inert) and integrates with facility safety interlocks for remote, repeatable operation.

Core Technical Features

• High-Pressure Metallurgy: 316L VIM-VAR stainless steel body rated for operating pressures up to 3,000 psig depending on configuration.
• High-Purity Surface Finish: Wetted pathways precision-finished to Ra 10 μin or lower (typical Ra down to 5 μin) to minimize particle generation and moisture entrapment.
• Hermetic Diaphragm Seal: Metal-to-metal diaphragm eliminates elastomeric seals and provides helium leak integrity below 1×10-9 atm cc/sec.
• Pneumatic Automation: Available in Normally Closed (NC) or Normally Open (NO) with instrument-air pneumatic actuator for spark-free, rapid cycling.

Installation and Safety Guidelines
Handle and install in a clean environment. Use the integrated VCR face-seal or tube butt-weld connections with new gaskets. Supply clean, dry instrument air at the specified pilot pressure. Perform helium leak testing and nitrogen purge before introducing active specialty gases.

HD SERIES
HIGH PRESSURE PNEUMATIC DIAPHRAGM VALVE

Features
Body

• 316L VIM-VAR stainless steel body for ultrahigh-purity applications.
• Internal surface finish achievable to Ra 5 μin; flow channel fully cleanable.
• Minimized entrapment areas to facilitate purging and maximize flow capacity.

Diaphragm

• Hastelloy C-22 or cobalt-based superalloy (UNS R30003) options for strength and corrosion resistance.
• Optimized geometry for extended cycle life.

Seat

• Fully contained PCTFE seat resists swelling and contamination, improves helium leak performance and reduces particle generation.
• High-cleanliness assembly and packaging suitable for semiconductor industry requirements.
• Each unit undergoes helium testing prior to shipment.

Technical Data
Reference dimensions in millimeters are provided in product documentation and may change with configurations.

Ordering Information
Standard options include NC/NO pneumatic actuators, VCR face-seal or butt-weld end connections, and diaphragm/seat material selections. See ordering tables on the product page.

Technical Specifications

• Body material: 316L stainless steel (VIM-VAR)
• Maximum operating pressure: up to 3,000 psig (refer to product tables for specific configurations)
• Internal surface finish: down to Ra 5 μin (typical Ra ≤ 10 μin for wetted pathways)
• Leak integrity: helium leak rate < 1×10-9 atm cc/sec (metal-to-metal diaphragm)
• Diaphragm materials: Hastelloy C-22 or cobalt-based superalloy (UNS R30003)
• Seat material: fully contained PCTFE
• Actuation: pneumatic actuator; available NC (Normally Closed) or NO (Normally Open)
• End connections: integrated VCR face-seal or tube butt-weld
• Cleanliness: high-clean assembly and packaging; helium testing performed on each unit
• Applications: laboratory specialty gases, semiconductor and analytical gas systems, gas chromatography, research institutes