Overview- HD SERIES high-pressure pneumatic diaphragm valve designed for ultrahigh-purity applications, suitable for semiconductor, laboratory and other high-tech industries.
Features- High-purity design minimizing contamination and entrapment areas.
- Optimized flow channel for complete cleaning, purging and maximized flow capacity.
- High cleanliness assembly and packaging suitable for the semiconductor industry.
- Every product undergoes helium testing prior to leaving the factory.
Body- Material: 316L VIM-VAR stainless steel for ultrahigh-purity applications.
- Inner surface roughness can reach Ra 5 μin, enabling complete cleanability of the flow channel.
- Design minimizes entrapment areas, facilitates purging and maximizes flow capacity.
Diaphragm- Material options: Hastelloy C-22 or cobalt-based superalloy (UNS R30003) for strength and corrosion resistance.
- Optimized design for long cycle life.
Seat- Fully contained PCTFE seat design providing excellent resistance to swelling and contamination.
- Improved helium leak test performance and minimal particle generation.
- Designed for long cycle life.
Technical DataTechnical diagrams and dimension drawings are provided on the product page. Dimensions are given in millimeters and are for reference only and are subject to change.
Product SizeDimensions, in millimeters, are provided for reference only and are subject to change.
Ordering InformationStandard ordering specifications and model options are presented (ordering details are provided as product documentation and images on the product page).
Specifications- Series: HD SERIES
- Body material: 316L VIM-VAR stainless steel
- Inner surface roughness: up to Ra 5 μin
- Diaphragm materials: Hastelloy C-22 or cobalt-based superalloy (UNS R30003)
- Seat material/design: Fully contained PCTFE seat
- Cleanliness: High-cleanliness assembly and packaging for semiconductor applications
- Testing: Helium leak testing performed on every unit
- Applications: Semiconductor, laboratory specialty gases, industrial gas distribution and other high-purity gas systems