Diaphragm valve

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Ultra High Purity Diaphragm Valve
LOW PRESSURE PNEUMATIC DIAPHRAGM VALVE

Features
Body

• 316L VIM‑VAR stainless steel body material for ultrahigh‑purity applications.
• Inner surface roughness can reach Ra 5 µin; flow channel can be completely cleaned.
• Design minimizes entrapment areas, facilitates purging and maximizes flow capacity.

Diaphragm

• Hastelloy C‑22 or cobalt‑based superalloys (UNS R30003) material for strength and corrosion resistance.
• Optimized design for long cycle life.

Seat

• Fully contained PCTFE seat design providing excellent resistance to swelling and contamination.
• Improved helium leak test performance.
• Minimal particle generation and long cycle life.

Additional Product Attributes

• High cleanliness assembly and packaging suitable for the high‑purity semiconductor industry.
• Every product undergoes helium testing prior to leaving the factory.

Technical Data
Technical illustrations and dimensional drawings are provided for reference (dimensions in millimetres are for reference only and are subject to change).

Product Size
Dimensions shown on product drawings are for reference and vary by model; consult the ordering specifications or product drawings for exact sizes.

Flow Channel Form
Flow channel geometry is optimized to minimize entrapment areas and maximize flow capacity; refer to flow‑channel illustrations for details.

Ordering Information
Standard ordering specifications and model illustrations are provided. Custom specifications and models are available as illustrated in the ordering information.