mass flow meter / for gas / low-pressure

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mass flow meter / for gas / low-pressure mass flow meter / for gas / low-pressure - SFM3200


  • Technology:


  • Fluid:

    for gas

  • Other characteristics:


  • Process pressure:

    Min.: 0.6 bar (8.7 psi)

    Max.: 1.07 bar (15.52 psi)

  • Process temperature:

    Min.: -60 °C (-76 °F)

    Max.: 100 °C (212 °F)


The SFM3200 mass flow meter is characterized by its wide dynamic measurement range of up to 250 slm, as well as its measurement accuracy at low flows. The special design of the flow channel results in a very low pressure drop through the flow body of the sensor, which makes it extremely suitable for medical ventilation and other respiratory applications. The thermal sensor element assures very fast signal processing time and bidirectional measurement mode, with the signal being internally linearized and temperature compensated.

The outstanding performance of the SFM3200 sensor is based on Sensirion's patented CMOSens® Technology. The technology allows the integration of the sensor element and the analysis electronics on a single, tiny CMOS silicon chip. The result is a highly stable and precise system for demanding and cost-sensitive applications.