The SFM3003 mass flow meter is Sensirion’s next-generation flow meter. Technically it is based on the SFM3019 meter that was brought onto the market during the Covid-19 pandemic to provide high volumes of flow meters for inspiratory flow measurements in medical ventilators. Compared to the SFM3019, the SFM3003 comes with a wider flow range as well as improved specifications.
The flow of air, oxygen and mixtures thereof at rates between -30 and 300 slm is measured with excellent accuracy, reliability and long-term stability, and no recalibration is needed. The SFM3003 outputs an easily integrable digital I2C interface. The signal is internally linearized and temperature compensated. Furthermore, the SFM3003 flow meter has a very low pressure drop, ultra-fast response time and optimal signal-to-noise ratio.
Several additional product versions exist for more options:
An extended flow range between -150 and 300 slm can be chosen with the SFM3003-300-CE
The SFM3013-300-CL offers an additional robustness to overpressure (up to 1 bar gauge pressure)
The SFM3013-300-CLM is also calibrated for heliox gas
As part of the SFM3xxx platform, the SFM3003 is a versatile sensor solution for many different high-volume applications in which cost efficiency is the priority. The outstanding performance of the SFM3003 sensor is based on Sensirion’s patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. The gas is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow-measuring technologies.